Removal function research on the fused silica mirror with 400 mm polishing wheel of the magnetorheological finishing

Xu Wang

doi:10.3788/COL201513.S22203

Chinese Optics Letters, Volume. 13, Issue Suppl., S22203(2015)

Removal function research on the fused silica mirror with 400 mm polishing wheel of the magnetorheological finishing

Xu Wang

Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics, and Physics, Chinese Academy of Sciences, Changchun 130033, China

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Figures & Tables(10)

Fig. 1. MRF polishing system: (a) manufacturing center MRF-2500 with the dual MRF polishing wheel; (b) picture of the 400 mm diameter MRF polishing wheel.

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Fig. 2. Removal function of different working distances: (a) 1, (b) 1.2, (c) 1.5, and (d) 2 mm.

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Fig. 3. Relationship between the removal function parameters and the working distance.

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Fig. 4. Surface map: (a) original map; (b) virtual fabrication with removal function in Fig. 2(a); (c) virtual fabrication with removal function in Fig. 2(d).

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Fig. 5. PSD analysis on Figs. 4(a)–4(c).

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Table 1. MRF-2500 Parameters
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Table 1. MRF-2500 Parameters
Maximum Mirror Diameter 2500 mm
X Axial Length 3000 mm
Y Axial Length 3000 mm
Z1 Axial Length 800 mm
Z2 Axial Length 800 mm
A Axes Swing Range $\pm 45^{°}$

Table 2. Working Parameters of the 400 mm Polishing Wheel
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Table 2. Working Parameters of the 400 mm Polishing Wheel
Wheel Rotation Speed $60 rev / \min$
Velocity of the Wheel $1.256 m / \min$
MRF Volume $1.5 L / \min$
Fabrication Time 10 s
Working Distance 1, 1.2, 1.5, and 2 mm

Table 3. Parameters of Removal Function under Different Working Distances
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Table 3. Parameters of Removal Function under Different Working Distances
Working Distance (mm) PV (μm/min) Volume Rate ( ${mm}^{3} / \min$ ) Length (mm) Width (mm)
1 1.745 0.251 28.9 14.4
1.2 1.596 0.180 27.1 11.8
1.5 1.286 0.121 24.3 10.4
2 1.174 0.083 23.3 9.30

Table 4. Fitting Parameters
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Table 4. Fitting Parameters
Parameter a b Adjusted $R^{2}$
PV Removal Rate 1.746 −0.619 0.9436
Volume Removal Rate 0.249 −1.688 0.9938
Removal Function Length 28.678 −0.330 0.9307
Removal Function Width 13.929 −0.650 0.9155

Table 5. Surface Data Error
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Table 5. Surface Data Error
Original Surface Fig. 2(a) Fig. 2(d) Convergence Fig. 2(a)/Fig. 2(d) (%/%)
PV ( $λ$ ) 4.7287 0.9724 1.020 79.44/78.43
rms ( $λ$ ) 0.5513 0.014 0.024 97.46/95.65

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Xu Wang, "Removal function research on the fused silica mirror with 400 mm polishing wheel of the magnetorheological finishing," Chin. Opt. Lett. 13, S22203 (2015)

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