Lithium niobate planar and ridge waveguides fabricated by 3 MeV oxygen ion implantation and precise diamond dicing

Jinhua Zhao; Xueshuai Jiao; Yingying Ren; Jinjun Gu; Sumei Wang; Mingyang Bu; Lei Wang

doi:10.3788/COL202119.060009

Chinese Optics Letters, Volume. 19, Issue 6, 060009(2021)

Lithium niobate planar and ridge waveguides fabricated by 3 MeV oxygen ion implantation and precise diamond dicing

Jinhua Zhao^1、*, Xueshuai Jiao¹, Yingying Ren², Jinjun Gu¹, Sumei Wang¹, Mingyang Bu¹, and Lei Wang³

Author Affiliations

¹School of Science, Shandong Jianzhu University, Jinan 250101, China

²Shandong Provincial Engineering and Technical Center of Light Manipulations & Shandong Provincial Key Laboratory of Optics and Photonic Device, School of Physics and Electronics, Shandong Normal University, Jinan 250014, China

³School of Physics, Shandong University, Jinan 250100, China

show less

Cited By

Article index updated: Apr. 3, 2024

Citation counts are provided from Web of Science. The counts may vary by service, and are reliant on the availability of their data.

The article is cited by 12 article(s) from Web of Science.

Tools

Get Citation

Copy Citation Text

Jinhua Zhao, Xueshuai Jiao, Yingying Ren, Jinjun Gu, Sumei Wang, Mingyang Bu, Lei Wang, "Lithium niobate planar and ridge waveguides fabricated by 3 MeV oxygen ion implantation and precise diamond dicing," Chin. Opt. Lett. 19, 060009 (2021)

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Special Issue on Lithium Niobate Based Photonic Devices

Received: Feb. 5, 2021

Accepted: Apr. 7, 2021

Published Online: May. 8, 2021

The Author Email: Jinhua Zhao (zhaojinhua@sdjzu.edu.cn)

DOI:10.3788/COL202119.060009

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology