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Laser & Optoelectronics Progress, Volume. 52, Issue 6, 60004(2015)

Research Status and Progress of Measurement Uncertainty in Interferometric Testing of Surface Figure

Quan Haiyang1,2、*, Hou Xi1, and Wu Fan1
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    Quan Haiyang, Hou Xi, Wu Fan. Research Status and Progress of Measurement Uncertainty in Interferometric Testing of Surface Figure[J]. Laser & Optoelectronics Progress, 2015, 52(6): 60004

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    Paper Information

    Category: Reviews

    Received: Nov. 13, 2014

    Accepted: --

    Published Online: May. 26, 2015

    The Author Email: Quan Haiyang (alsea111.1989@163.com)

    DOI:10.3788/lop52.060004

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology