[3] [3] Michett. Optical Systems for Soft X-rays [M]. New York: Plenum Press, 1986. 101

[4] [4] E. J. Puilk, M. J. Vander Wiel, H. Z. Lemaker et al.. The effect on the interface roughness and its X-ray reflectance [J]. Rev. Sci. Instrum., 1992, 63:1415～1419

[5] [5] C. Montcalm, B. T. Sullivan, M. Ranger et al.. Mo/Y multiplayer mirrors for the 8～12 nm wavelength region [J]. Opt. Lett., 1994, 19(13):1173～1175