High Power Laser and Particle Beams, Volume. 33, Issue 6, 065012(2021)
Attenuation characteristics of electromagnetic wave in inductive coupled plasma based on variation of discharge power
Figures & Tables(13)
Fig. 1. Schematic diagram of a closed plasma hierarchical calculation model
Fig. 2. Schematic diagram and picture of discharge chamber and antenna of flat plate ICP generator
Fig. 3. Electron density measurement and fitting results of closed plasma
Fig. 8. Attenuation of microwave in ICP plasma when the power is 400 W
Fig. 9. Attenuation of microwave in ICP plasma to when the power is 500 W
Fig. 10. Attenuation of microwave in ICP plasma when the power is 600 W
Fig. 11. Variation of average attenuation in 5.92～6.8 GHz frequency band
Fig. 12. Variation of attenuation peak of 5.92～6.8 GHz frequency band
Fig. 13. Comparison between calculation and experiment of electromagnetic wave attenuation by plasma at 400 W
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Mao Lin, Haojun Xu, Xiaolong Wei, Xinmin Han, Yipeng Chang, Min Lin. Attenuation characteristics of electromagnetic wave in inductive coupled plasma based on variation of discharge power[J]. High Power Laser and Particle Beams, 2021, 33(6): 065012
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Received: Nov. 26, 2020
Accepted: --
Published Online: Jul. 22, 2021
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