[1] Li D Z, Guo X N, Yan Z C et al. Finite element analysis of PDMS substrate based on Abaqus[J]. Electronic Components and Materials, 34, 57-60(2015).

[2] Toepke M W, Beebe D J. PDMS absorption of small molecules and consequences in microfluidic applications[J]. Lab on a Chip, 6, 1484-1486(2006).

[3] Jo B H, van Lerberghe L M, Motsegood K M et al. Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer[J]. Journal of Microelectromechanical Systems, 9, 76-81(2000).

[4] Bhattacharya S, Datta A, Berg J M et al. Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength[J]. Journal of Microelectromechanical Systems, 14, 590-597(2005).

[5] Shin Y S, Cho K, Lim S H et al. PDMS-based micro PCR chip with parylene coating[J]. Journal of Micromechanics and Microengineering, 13, 768-774(2003).

[6] Hoipkemeier-Wilson L, Schumacher J F, Carman M L et al. Antifouling potential of lubricious, micro-engineered, PDMS elastomers against zoospores of the green fouling alga Ulva (Enteromorpha)[J]. Biofouling, 20, 53-63(2004).

[7] Xu S, Zhang Y H, Jia L et al. Soft microfluidic assemblies of sensors, circuits, and radios for the skin[J]. Science, 344, 70-74(2014).

[8] Shi Q, Su Y L, Zhu S P et al. A facile method for synthesis of pegylated polyethersulfone and its application in fabrication of antifouling ultrafiltration membrane[J]. Journal of Membrane Science, 303, 204-212(2007).

[9] Xu J T[D]. Magneto-induced stress of PDMS-based magnetic film and its effect on optical properties of the film, 45-59(2020).

[10] Prabhakar R S, Freeman B D, Roman I. Gas and vapor sorption and permeation in poly(2, 2, 4-trifluoro-5-trifluoromethoxy-1, 3-dioxole-co-tetrafluoroethylene)[J]. Macromolecules, 37, 7688-7697(2004).

[11] Singh A, Freeman B D, Pinnau I. Pure and mixed gas acetone/nitrogen permeation properties of polydimethylsiloxane [PDMS][J]. Journal of Polymer Science Part B: Polymer Physics, 36, 289-301(1998).

[12] Pinnau I, Casillas C G, Morisato A et al. Hydrocarbon/hydrogen mixed gas permeation in poly(1-trimethylsilyl-1-propyne) (PTMSP), poly(1-phenyl-1-propyne) (PPP), and PTMSP/PPP blends[J]. Journal of Polymer Science Part B: Polymer Physics, 34, 2613-2621(1996).

[13] Prabhakar R S, Raharjo R, Toy L G et al. Self-consistent model of concentration and temperature dependence of permeability in rubbery polymers[J]. Industrial & Engineering Chemistry Research, 44, 1547-1556(2005).

[14] Hosokawa K, Maeda R. Low-cost technology for high-density microvalve arrays using polydimethylsiloxane (PDMS)[C], 531-534(2001).

[15] Bunyan J, Tawfick S. Mechanical behavior of PDMS at low pressure[J]. Materials Research Express, 4, 075306(2017).

[16] Whitesides G M, Ostuni E, Takayama S et al. Soft lithography in biology and biochemistry[J]. Annual Review of Biomedical Engineering, 3, 335-373(2001).

[17] Sivakumar R, Trinh K T L, Lee N Y. Heat and pressure-resistant room temperature irreversible sealing of hybrid PDMS-thermoplastic microfluidic devices via carbon-nitrogen covalent bonding and its application in a continuous-flow polymerase chain reaction[J]. RSC Advances, 10, 16502-16509(2020).

[18] Liu H, Bai B B, Zhang Y Z et al. High-sensitivity temperature measurement based on SPR in gold-PDMS-coated photonic crystal fiber[J]. Chinese Journal of Lasers, 47, 0404003(2020).

[19] Wang C, Zhang X Z, Jiang J F et al. High-speed airflow measurement system based on optical fiber Fabry-Perot sensing[J]. Acta Optica Sinica, 40, 1206005(2020).