Acta Optica Sinica, Volume. 28, Issue 8, 1590(2008)

Design of Laser Beam Real-Time Monitoring and Adaptive Collimation System

Wei Pengfei1,2、*, Liu Jun1, Li Xiaofang1, Chen Xiaowei1, Liu Peng1, Li Ruxin1, and Xu Zhizhan1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    CLP Journals

    [1] Hua Hengqi, Zhao Xueqing, Xue Quanxi, Huang Ke, Zheng Guoxin, Xiao Weiwei. Optical Automatic Alignment on Amplification Experiment of Double Ultroviolet Laser Pulse[J]. Chinese Journal of Lasers, 2010, 37(S1): 167

    [2] Liu Qinhou, Feng Guoying, Deng Guoliang, Wang Guozhen, Long Fengqiong. Theoretical and Experimental Studies on Influence of Collimation Error on Beam Quality Factor Measurement[J]. Chinese Journal of Lasers, 2017, 44(9): 905001

    [3] WANG Da-hui, QIAN Hang, ZHAO Xue-qing, MA Lian-ying, ZHANG Yong-sheng, SHAO Bi-bo, FENG Gang, YI Ai-ping, ZHAO Jun. Automatic alignment of multiplexed beams of excimer laser system based on fluorescence imaging[J]. Optics and Precision Engineering, 2015, 23(4): 949

    [4] Wang Wei, Bayanheshig, Pan Mingzhong, Song Ying, Li Wenhao. Beam Alignment Error and Its Control in Scanning Beam Interference Lithography System[J]. Acta Optica Sinica, 2017, 37(7): 722003

    [5] LI Hong, LIN Qiang, YANG Peng-qian, ZHANG Yan-li, LIU Dai-zhong, ZHU Bao-qiang, ZHU Jian-qiang. The Fast Algorithm of Auto-lalignment Based on Spot Shape[J]. Acta Photonica Sinica, 2017, 46(11): 1114002

    [6] WANG Wei, LI Dong-jian, LI Hong-guang, WANG Zheng-zhou, CAO Shi-kang. Irregular image adaptive focusing system for diffraction grating[J]. Optics and Precision Engineering, 2014, 22(4): 822

    [7] Lu Quan, Han Baojun, Liu Shangqian, Wang Huifeng. A Method of Curvature Measurement Based on Charge Coupled Device Dual-Laser Collimation[J]. Chinese Journal of Lasers, 2010, 37(2): 543

    [8] Zeng Peiying, Liu Daizhong, Peng Zengyun, Tang Xiaoyun, Ji Tong, Zhu Baoqiang, Liu Dean, Zhu Jianqiang. Research of Auto-Alignment System Based on Ethernet[J]. Chinese Journal of Lasers, 2014, 41(3): 302009

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    Wei Pengfei, Liu Jun, Li Xiaofang, Chen Xiaowei, Liu Peng, Li Ruxin, Xu Zhizhan. Design of Laser Beam Real-Time Monitoring and Adaptive Collimation System[J]. Acta Optica Sinica, 2008, 28(8): 1590

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Nov. 12, 2007

    Accepted: --

    Published Online: Aug. 31, 2009

    The Author Email: Pengfei Wei (personinjoy@hotmail.com)

    DOI:

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