Fig. 1. Schematic diagram of the detection principle

Fig. 2. Schematic diagram of the two-sphere method. (a) Confocal position 0°; (b) Confocal position 180°; (c) Cat's eye position

Fig. 3. Zemax optical path model. (a) Objective lens to be tested; (b) Optical path without microscope objective lens; (c) Optical path at confocal position; (d) Optical path at cat's eye position

Fig. 4. Wavefront aberration map. (a) Original aberration of the objective lens; (b) Original aberration of the spherical mirror; (c) Aberration at 0° confocal position; (d) Aberration at 180° confocal position; (e) Aberration at cat's eye position; (f) Aberration of the optical path without the objective lens; (g) Computed aberration of the spherical mirror; (h) Computed aberration of the objective lens

Fig. 5. Experimental setup picture

Fig. 6. Optical axis coordinate positioning diagram

Fig. 7. Wavefront aberration map. (a) 0° confocal position; (b) 180° confocal position; (c) Cat's eye position; (d) Detection optical path without the microscope objective; (e) Spherical mirror; (f) Microscope objective

Fig. 8. Comparison diagrams of Zernike coefficients before and after calibration of microscope objectives

Fig. 9. Comparison diagrams of PV and RMS calibration of microscope objectives

Fig. 10. Comparison of different angles of the objective. (a) 0°;(b) 90°; (c) 180°; (d) 270°