Chinese Journal of Lasers, Volume. 52, Issue 6, 0613001(2025)

Angle‑Twisted Interference Lithography of Narrow‑Gap Moire Grating and Its Surface‑Enhanced Raman Spectra

Wanting Sun, Yinzhou Yan*, Chen Zhao, Yan Zhao, and Yijian Jiang
Author Affiliations
  • School of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing 100124, China
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    Figures & Tables(10)
    Fabrication diagrams of narrow-gap AuNF Moire-grating. (a) Single exposure by dual-beam interference; (b) double exposure by angle-twisted dual-beam interference; (c) 1D grating structure by single exposure; (d) Moire-grating structure with double exposures by angle-twisted dual-beam interference; (e) cross-section views of AuNF Moire-gratings with different AuNF thicknesses along Moire pattern direction and widths of narrow-gap slits; (f) narrow-gap AuNF Moire-grating structure with physical object image shown in inset
    Micrographs of narrow-gap AuNF Moire-gratings. (a)‒(k) Microscopic morphologies of narrow-gap AuNF Moire-gratings under different α; cross-section micrographs; (l) perpendicular and (m) parallel to Moire fringe directions
    Resonant absorption law of narrow-gap AuNF Moire-grating. (a) Experimentally measured and (b) numerically simulated reflectance spectra as a function of α (circularly polarized light excitation); SPR and LSPR optical field distributions of AuNF Moire-gratings excited by (c) s-polarization and (d) p-polarization components with excitation wavelengths of 633 nm and 785 nm
    Polarization dependence of narrow-gap AuNF Moire-gratings. (a) Polarization definition diagram; (b)-(l) variation of reflectance spectra with θ under different α
    Raman detection limits for CV molecules on different substrates excited by 633 nm laser. (a) Si substrate; (b) AuNF substrate; (c) AuNF 1D-grating substrate; AuNF Moire-grating substrates under (d) p-polarization and (e) s-polarization excitations
    Raman detection limits for CV molecules on different substrates excited by 785 nm laser. (a) Si substrate; (b) AuNF substrate; (c) AuNF 1D-grating substrate; AuNF Moire-grating substrate under (d) p-polarization and (e) s-polarization excitations
    SERS polarization dependence characteristics and homogeneity of narrow-gap AuNF Moire-grating substrate. Polarization dependence under (a) 633 nm and (b) 785 nm excitation resonance wavelength matching conditions ; polarization dependence under (c) 633 nm and (d) 785 nm excitation resonance wavelength mismatch conditions; (e) evolution of Raman characteristic peak intensity of CV molecule at 1617 cm-1 with molecular concentration under incident conditions of p-polarization and s-polarization with excitation wavelength of 633 nm ; (f) SERS uniformity test of AuNF Moire-grating substrates
    • Table 1. Moire-grating periods fabricated under different α

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      Table 1. Moire-grating periods fabricated under different α

      ConditionMoire-grating period /nm
      α=20°α=22°α=24°α=26°α=28°α=30°α=32°α=34°α=36°α=38°α=40°
      Experiment856±21763±27707±19665±31612±28576±15551±23532±16493±36473±25446±17
      Calculation864786721667620580544513485461439
    • Table 2. SPR absorption peak positions of narrow-gap AuNF Moire-gratings

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      Table 2. SPR absorption peak positions of narrow-gap AuNF Moire-gratings

      ConditionSPR absorption peak position /nm
      α=20°α=22°α=24°α=26°α=28°α=30°α=32°α=34°α=36°α=38°α=40°
      Experiment875809745702668639618600570556540
      Simulation895833761708674640613591575563552
    • Table 3. Raman detection limits of narrow-gap AuNF Moire-grating substrates under excitation wavelength matching and mismatch conditions

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      Table 3. Raman detection limits of narrow-gap AuNF Moire-grating substrates under excitation wavelength matching and mismatch conditions

      SPR absorption wavelengthExcitation wavelength of 633 nmExcitation wavelength of 785 nm
      p polarizations polarizationp polarizations polarization
      638 nm10-10 mol/L10-10 mol/L10-9 mol/L10-7 mol/L
      776 nm10-10 mol/L10-8 mol/L10-9 mol/L10-9 mol/L
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    Wanting Sun, Yinzhou Yan, Chen Zhao, Yan Zhao, Yijian Jiang. Angle‑Twisted Interference Lithography of Narrow‑Gap Moire Grating and Its Surface‑Enhanced Raman Spectra[J]. Chinese Journal of Lasers, 2025, 52(6): 0613001

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    Paper Information

    Category: micro and nano optics

    Received: Sep. 3, 2024

    Accepted: Oct. 22, 2024

    Published Online: Mar. 19, 2025

    The Author Email: Yinzhou Yan (yyan@bjut.edu.cn)

    DOI:10.3788/CJL241183

    CSTR:32183.14.CJL241183

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