Chinese Journal of Lasers, Volume. 36, Issue s2, 364(2009)
Investigation of InGaZnO Polycrystal Target Fabrication and Thin Film Growth
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Chen Jiangbo, Wang Li, Su Xueqiong, Kong Le, Liu Guoqing, Zhang Xinping. Investigation of InGaZnO Polycrystal Target Fabrication and Thin Film Growth[J]. Chinese Journal of Lasers, 2009, 36(s2): 364
Paper Information
Category: materials and thin films
Received: --
Accepted: --
Published Online: Dec. 30, 2009
The Author Email: Chen Jiangbo (tequila2008@emails.bjut.edu.cn)
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