Fig. 1. Schematic diagram of electronically controlled optical sampling principle

Fig. 2. Schematic diagram of distance measurement system. (a) Spectrum of signal laser; (b) spectrum of local laser; (c) experimental setup

Fig. 3. Measurement results of 41 μm static distance

Fig. 4. Allan deviation of 41 μm absolute distance measurement

Fig. 5. Distance measurement results at different modulation voltages

Fig. 6. Comparison between measured values and real values

Fig. 7. Groove depth analysis. (a) Measurement result of groove depth; (b) micromechanical device