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Piezoelectrics & Acoustooptics, Volume. 44, Issue 1, 6(2022)

Propagation Characteristics of Surface Acoustic Wave Based on ScAlN/6H-SiC Structure

NAI Riga1,2, MA Jun1,2, WANG Yuanyuan1,2, DOU Yawen1,2, LYU Haitao1,2, QIAN Lirong1,2, and LI Cuiping1,2
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    NAI Riga, MA Jun, WANG Yuanyuan, DOU Yawen, LYU Haitao, QIAN Lirong, LI Cuiping. Propagation Characteristics of Surface Acoustic Wave Based on ScAlN/6H-SiC Structure[J]. Piezoelectrics & Acoustooptics, 2022, 44(1): 6

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    Paper Information

    Received: Oct. 27, 2021

    Accepted: --

    Published Online: Mar. 16, 2022

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2022.01.002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology