Infrared and Laser Engineering, Volume. 51, Issue 9, 20220190(2022)
High-precision shape measurement technology for convex aspheric with small aperture and large convex asphericity
Figures & Tables(9)
Fig. 1. Schematic diagram of testing convex aspheric with CGH method
Fig. 2. Convex aspheric parameters and simulation results. (a) Convex aspheric parameters; (b) Simulation results of vector height and asphericity
Fig. 3. Optical path structure parameters of convex aspheric detected by CGH
Fig. 4. Test CGH design results. (a) Residual wavefront; (b) CGH phase and fringe frequency distribution
Fig. 5. Alignment CGH design results. (a) Residual wavefront; (b) CGH phase and fringe frequency distribution
Fig. 7. Measurement of convex aspheric by CGH method. (a) Test site; (b) Test result of surface shape
Fig. 8. Measurement of convex aspheric by Luphoscan method. (a) Test site; (b) Surface shape test results
Table 1. CGH design result and its manufacturing parameter
View tableView in ArticleTable 1. CGH design result and its manufacturing parameter
Parameters Test CGH Alignment CGH Manufacturing error CGH substrate material Corning 7980 - CGH substrate size 101.6 mm×101.6 mm×4.970 mm Thickness error: 0.002 mm Transmission wavefront (RMS): 4.98 nm Diffraction type Phase Amplitude - Diffraction order +1 +3 - Width ratio 0.5 - Step height 460 nm - Step uniformity: 1.3% Aperture range 0-42 mm 43-50 mm - Fringe number 5260 1282 - Minimum fringe width About 2.4 μm About 3.0 μm -
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Jiani Liu, Anhe Chen, Zhiyong Li, Fangyuan Xia, Bingcai Liu, Shijie Li. High-precision shape measurement technology for convex aspheric with small aperture and large convex asphericity[J]. Infrared and Laser Engineering, 2022, 51(9): 20220190
Paper Information
Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface
Received: Mar. 16, 2022
Accepted: --
Published Online: Jan. 6, 2023
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