Effects of Sputtering Parameters on Optical Constant of NiO<sub>x</sub> Thin Films*

Acta Photonica Sinica, Volume. 38, Issue 2, 302(2009)

Effects of Sputtering Parameters on Optical Constant of NiO_x Thin Films*

LI Xiao-gang^1、* and TANG Xiao-dong²

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¹[in Chinese]

²[in Chinese]

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LI Xiao-gang, TANG Xiao-dong. Effects of Sputtering Parameters on Optical Constant of NiO_x Thin Films*[J]. Acta Photonica Sinica, 2009, 38(2): 302

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Received: Oct. 11, 2007

Accepted: --

Published Online: May. 10, 2010

The Author Email: LI Xiao-gang (xdtang@sist.ecnu.edu.cn)

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