Semiconductor Optoelectronics, Volume. 44, Issue 5, 699(2023)
Research on the Influence of Dynamic Balance of Abrasive Layer on the Rough Grinding Process of Sapphire Substrate
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DING Peng, LI Bing. Research on the Influence of Dynamic Balance of Abrasive Layer on the Rough Grinding Process of Sapphire Substrate[J]. Semiconductor Optoelectronics, 2023, 44(5): 699
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Received: Jul. 2, 2023
Accepted: --
Published Online: Nov. 20, 2023
The Author Email: DING Peng (dingp@cetccq.com.cn)
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