Photonic Sensors, Volume. 7, Issue 2, 171(2017)

Improving Smoothing Efficiency of Rigid Conformal Polishing Tool Using Time-Dependent Smoothing Evaluation Model

Chi SONG1,2、*, Xuejun ZHANG1,3, Xin ZHANG1,3, Haifei HU1,3, and Xuefeng ZENG1,3
Author Affiliations
  • 1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, China
  • 2University of Chinese Academy of Sciences, Beijing, 100049, China
  • 3Key Laboratory of Optical System Advanced Manufacturing Technology, Chinese Academy of Sciences, Changchun, 130033, China
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    Chi SONG, Xuejun ZHANG, Xin ZHANG, Haifei HU, Xuefeng ZENG. Improving Smoothing Efficiency of Rigid Conformal Polishing Tool Using Time-Dependent Smoothing Evaluation Model[J]. Photonic Sensors, 2017, 7(2): 171

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    Paper Information

    Category: Regular

    Received: Nov. 3, 2016

    Accepted: Jan. 10, 2017

    Published Online: May. 9, 2017

    The Author Email: SONG Chi (songchi7787@126.com)

    DOI:10.1007/s13320-017-0400-x

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