In-line digital holography for dynamic metrology of MEMS

Chinese Optics Letters, Volume. 7, Issue 12, 1117(2009)

[in Chinese] and [in Chinese]

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Vijay Raj Singh* and Anand Asundi

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[in Chinese], [in Chinese], "In-line digital holography for dynamic metrology of MEMS," Chin. Opt. Lett. 7, 1117 (2009)

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Paper Information

Received: Jun. 18, 2009

Accepted: --

Published Online: Dec. 18, 2009

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