Acta Physica Sinica, Volume. 69, Issue 13, 137701-1(2020)

Recent research progress of ferroelectric negative capacitance field effect transistors

Jun-Dong Chen1,2, Wei-Hua Han1,2、*, Chong Yang1,2, Xiao-Song Zhao1,2, Yang-Yan Guo1,2, Xiao-Di Zhang1,2, and Fu-Hua Yang1,2、*
Author Affiliations
  • 1Engineering Research Center of Semiconductor Integrated Technology, Beijing Engineering Research Center of Semiconductor Micro-Nano Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(30)
    Roadmap of subthreshold swing (SS) proposed by IRDS[8].
    The schematic diagram of the classification of dielectrics.
    Ferroelectric hysteresis loop[41].
    Chemical and crystal structures of the metal-free A(NH4) X3 family[56]: (a) Chemical structures of constituents of the metal-free 3D perovskite ferroelectrics; (b) the packing diagram of MDABCO–NH4I3 in the ferroelectric phase at 293 K. The oval to the right contains the space-fill diagram of the organic cation, showing the cationic geometry to be close to a ball; (c) the packing diagram of MDABCO–NH4I3 in the paraelectric phase at 463 K.
    The transfer characteristic curve of field effect transistors.
    The schematic diagram of a standard field effect transistors.structure and its eauivalent circuit of capacitance[73].
    Device structure diagram: (a) Traditional MOSFETs; (b) MFIS; (c) MFMIS.
    (a) Conventional unit cell of an FE perovskite (ABO3)[85]; (b) schematic of the dipole fields in the (200) plane[85].
    The relationship between polarization P and electric field E of ferroelectrics: (a) P vs. E; (b) hysteresis diagram.
    (a) QFE vs. VFE of ferroelectrics; (b) UFE vs. QFE of ferroelectrics.
    Energy landscapes of CFE, CDE and their series combination[90].
    Ferroelectric NC measured by small-signal measurement mode: (a) Equivalent circuit diagram[91]; (b) schematic diagram of a LAO/BSTO superlattice stack[90]; (c) capacitance dependence on voltage[90].
    The schematic of a R-CFE circuit for studying the transient NC in ferroelectrics[99].
    The simulation results of transient NC[99]: (a) Input voltage, output voltage, and free charge on a ferroelectric capacitor as functions of time; (b) polarization and free charge as functions of time; (c) charge density per unit time for free charge and polarization and the difference between them; (d) change in the voltage across a ferroelectric capacitor per unit time as a function of time.
    (a) The effect of the external resistance on transient NC in a R-CFE circuit; (b)the effect of the viscosity coefficient on transient NC in a R-CFE circuit[99].
    The relationship between capacitive charge and voltage of the device: (a) Capacitance model; (b) ; (c) (d) Fe-NCFETs[91]; (e) Fe-FETs[91].
    Planar Silicon based HfAlO Fe-NCFETs[116]: (a) HR TEM cross-section image; (b) polarization as a function of nitrogen content of TaN; (c) schematic band diagram of HfAlO before and after F-passivation; (d) SS as a function of VDS after different treatments.
    Silicon based NC-FinFET[123]: (a) TEM cross-sectional image of NC-FinFET with TiN internal gate, HfZrO FE film and TiN gate; (b) the gate amplification coefficient as a function of VG for NC-FinFET; (c) SS as a function of VG for conventional FinFET and NC-FinFET.
    (a) TEM cross-sectional image of silicon based NC-p-FinFET[124]; (b) IDS as a function of gate length[124].
    Two-layer stacked silicon nanowire GAA Fe-NCFETs[126] : (a) TEM cross-sectional image of the device; (b) HRTEM of a portion of the channel; (c) the GIXRD spectrum for the as-deposited HZO layer.
    Germanium based HZO NC-pFET[129]: (a) Schematic diagram of the device with Ge channel; (b) schematic diagram of the device with Ge-Sn channel; (c) transfer characteristic curve of the device with Ge channel; (d) transfer characteristic curve of the device with Ge-Sn channel.
    Germanium nanowire NC-pFET[135]: (a) The transfer characteristic curve at different sweep times for ±5 V sweep range; (b) hysteresis versus sweep time for ±5 V sweep range; (c) maximum drain current versus sweep time for different sweep ranges.
    In0.53Ga0.47As channel Fe-NCFETs: (a) Schematic diagram[136] and (c) transfer characteristic curve of planar device[136]; (b) schematic diagram[137] and (d) transfer characteristic curve of Fin device[137].
    Carbon nanotube Fe-NCFETs[138]: (a) TEM cross-sectional image; (b) Pr vs. E; (c) the transfer characteristic curve; (d) IGS as a function of VGS.
    MoS2 Fe-NCFETs[145]: (a) Structure of the device; (b)transfer characteristic curve of VG = ± 7 V; (c)transfer characteristic curve of VG = ± 10 V.
    WSe2 Fe-NCFETs[140]: (a) Structure of MFIS device; (b) structure of MFMIS device; (c) transfer characteristic curve of MFIS device; (d) transfer characteristic curve of MFMIS device.
    Graphene-HfxAlyO2 transistor[154]: (a) HfxAlyo2 films deposited on graphene/SiO2 substrates; (b) relative dielectric constant of HfxAlyO2; (c) energy difference among three phases in HfxAlyO2 with different Al concentrations; (d) transfer characteristic curve.
    Black phosphorus Fe-NCFETs[155]: (a) Structure of the device; (b) transfer characteristic curve; (c) SS in different Id.
    SS versus Hysteresis of the reported Fe-NCFETs (2D[30,33,108,140,144,146-148,155], Si[25,116,118,119,121,123-126], GeSn[129,130,134,156], InGaAs[136,137]).
    • Table 1. [in Chinese]

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      Table 1. [in Chinese]

      MOS structureChannel materialsGate structureFerroelectric materialstFE/nm SSmin/ (mV·dec–1) Hysteresis/VOrders of IDSVD/V ION/IOFFYearRef.
      Planarp-SiMFISHf0.65Zr0.35O2305–0.51042014[115]
      Planarn-SiMFISHfAlO (Al: 6%)10Sub-250.0240.21082017[116]
      Planarn-SiMFISHf0.75Zr0.25O21040Free10.21072018[119]
      Planarn-SiMFISHf0.53Zr0.47O25~40~0.120.21072019[121]
      Planarn-SiMFISHfAlO (Al: 4%)10Sub-300.0240.21082019[118]
      FinFETn-SiMFISHf0.5Zr0.5O24Sub-300.00320.051072018[25]
      FinFETn-SiMFMISHf0.42Zr0.58O25580.00310.11052015[123]
      FinFETn-SiMFISHf0.5Zr0.5O25Sub-60Free0.11072019[125]
      FinFETp-SiMFMISHf0.42Zr0.58O2334.50.0092–0.051042019[124]
      FinFETn-SiMFISHf0.5Zr0.5O25Sub-60Free0.11072019[125]
      GAApoly n-SiMFISHf0.5Zr0.5O21026.840.00340.11082019[126]
      Planarp-GeMFMISHf0.5Zr0.5O26.5432.341–0.051032016[129]
      Planarp-GeSnMFMISHf0.5Zr0.5O26.5400.412–0.051032016[129]
      Planarp-GeSnMFMISHf0.5Zr0.5O26Sub-20< 0.012–0.051042017[130]
      Planarp-GeMFMISHf0.5Zr0.5O24.5~87.5Free–0.051032019[156]
      Planarp-GeMFISHf0.67Zr0.33O27~125~0.105–0.51042019[134]
      Planarn-InGaAsMFISHf0.5Zr0.5O2823~0.230.051052018[136]
      FinFETn-InGaAsMFISHf0.5Zr0.5O25230.210.051032019[137]
      GAAnanotubeMFMISHfAlO(Al: 7%)10~450.051042018[138]
      2D-FETMoS2MFMISHf1-xZrxO215Sub-601.230.51052017[146]
      2D-FETMoS2MFMISHf0.5Zr0.5O2156.070.540.51052017[33]
      2D-FETMoS2MFMISHfAlO(Al:7.3%)10570.540.51052017[108]
      2D-FETMoS2MFMISHfZrOx15472.510.11062018[30]
      2D-FETMoS2MFISHf0.5Zr0.5O220Sub-60< 0.00540.51062018[147]
      2D-FETMoS2MFISHf0.5Zr0.5O220230.07760.11092017[144]
      2D-FETWSe2MFMISHf0.5Zr0.5O22014.40.122–0.11052018[140]
      2D-FETWSe2MFISHf0.5Zr0.5O21018.20.024–0.11042018[148]
      2D-FETGrapheneMFSHfAlO(Al:9.5%)50.12.752016[154]
      2D-FETBPMFMISHf0.5Zr0.5O2201040.50.11022019[155]
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    Jun-Dong Chen, Wei-Hua Han, Chong Yang, Xiao-Song Zhao, Yang-Yan Guo, Xiao-Di Zhang, Fu-Hua Yang. Recent research progress of ferroelectric negative capacitance field effect transistors[J]. Acta Physica Sinica, 2020, 69(13): 137701-1

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    Paper Information

    Received: Mar. 10, 2020

    Accepted: --

    Published Online: Jan. 4, 2021

    The Author Email: Yang Fu-Hua (fhyang@semi.ac.cn)

    DOI:10.7498/aps.69.20200354

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