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Microelectronics, Volume. 53, Issue 4, 695(2023)

Research Progress of Silicon-Based Ultra-Thin Chips for Flexible Electronics

TANG Xinyue1,2, HONG Min1,2, LUO Ting1,2, CHEN Xian1,2, ZHANG Jing1,2, WANG Peng1,2, ZHANG Peijian1,2, and ZHANG Zhengyuan1,2
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    TANG Xinyue, HONG Min, LUO Ting, CHEN Xian, ZHANG Jing, WANG Peng, ZHANG Peijian, ZHANG Zhengyuan. Research Progress of Silicon-Based Ultra-Thin Chips for Flexible Electronics[J]. Microelectronics, 2023, 53(4): 695

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    Received: Nov. 26, 2022

    Accepted: --

    Published Online: Jan. 3, 2024

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.220480

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology