PhotoniX, Volume. 4, Issue 1, 30(2023)

Integrated heterodyne laser Doppler vibrometer based on stress-optic frequency shift in silicon nitride

Adam Raptakis1,*... Lefteris Gounaridis1, Jörn P. Epping2, Thi Lan Anh Tran2, Thomas Aukes3, Moritz Kleinert4, Madeleine Weigel4, Marco Wolfer5, Alexander Draebenstedt5, Christos Tsokos1, Panos Groumas1,6, Efstathios Andrianopoulos1, Nikos Lyras1, Dimitrios Nikolaidis1, Elias Mylonas1, Nikolaos Baxevanakis6, Roberto Pessina7, Erik Schreuder2, Matthijn Dekkers3, Volker Seyfried5, Norbert Keil4, René G. Heideman2, Hercules Avramopoulos1, and Christos Kouloumentas16 |Show fewer author(s)
Author Affiliations
  • 1Photonic Communications Research Laboratory, Institute of Communication and Computer Systems, National Technical University of Athens, 15573 Zografou, Greece
  • 2LioniX International BV, P.O. Box 456, 7500 AL Enschede, The Netherlands
  • 3SolMateS BV, Auke Vleerstraat 3, 7521 PE Enschede, The Netherlands
  • 4Fraunhofer Institute for Telecommunications, HHI, 1058 Berlin, Germany
  • 5Polytec GmbH, 76337, Waldbronn, Germany
  • 6Optagon Photonics, Agia Paraskevi 15341, Athens, Greece
  • 7Cordon Electronics Italia S.R.L, San Martino 7, Agrate Brianza 20864, Italy
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    References(57)

    [7] [7] Li Y, Meersman S, Baets R. Optical frequency shifter on SOI using thermo-optic serrodyne modulation. In 7th IEEE International Conference on Group IV Photonics. Beijing: IEEE; 2010. p. 75–77. .

    [14] [14] Kodigala A, et al. Silicon Photonic Single-Sideband Generation with Dual-Parallel Mach-Zehnder Modulators. In Conference on Lasers and Electro-Optics. San Jose, California; 2019. .

    [19] [19] Spuesens T, et al. Integrated Optical Frequency Shifter on a Silicon Platform. In Conference on Lasers and Electro-Optics. San Jose, California; 2016. .

    [20] [20] Yamaguchi Y, Kanno A, Kawanishi T, Izutsu M, Nakajima H. Pure Single-Sideband Modulation Using High Extinction-Ratio Parallel Mach-Zehnder Modulator with Third-Order Harmonics Superposition Technique. In CLEO: 2015. San Jose, California: 2015. p. JTh2A.40. .

    [23] [23] Jin W, Polcawich RG, Morton PA, Bowers JE. Piezoelectrically tuned silicon nitride ring resonator. 2018:14.

    [26] [26] Tsia KK, Fathpour S, Jalali B. Electrical tuning of birefringence in silicon waveguides. Appl Phys Lett. 2008;92(6):061109. .

    [27] [27] Sebbag Y, et al. Bistability in silicon microring resonator based on strain induced by a piezoelectric lead zirconate titanate thin film. Appl Phys Lett. 2012;100(14):141107. .

    [30] [30] Epping JP, et al. Ultra-low-power stress-optics modulator for microwave photonics. Presented at the SPIE OPTO. San Francisco, California: 2017. 101060F. .

    [31] [31] Epping JP, et al. Ultra-low-power stress-based integrated photonic phase actuator. 2018:3.

    [32] [32] Everhardt A, et al. Ultra-low power stress-based phase actuation in TriPleX photonic circuits. In Integrated Optics: Devices, Materials, and Technologies XXVI. San Francisco: 2022. p. 11. .

    [33] [33] Casset F, et al. Stress optic modulator using thin-film PZT for LIDAR applications. In 2019 IEEE SENSORS, Montreal: IEEE; 2019. p 1–4. .

    [36] [36] Ansari I, et al. Light modulation in Silicon photonics by PZT actuated acoustic waves. ArXiv211207988 Phys. 2021. Accessed 30 Jan 2022. Available: http://arxiv.org/abs/2112.07988

    [38] [38] Nguyen MD, Tiggelaar R, Aukes T, Rijnders G, Roelof G. Wafer-scale growth of highly textured piezoelectric thin films by pulsed laser deposition for micro-scale sensors and actuators. J Phys Conf Ser. 2017;922:012022. .

    [44] [44] Johansmann M, Siegmund G, Pineda M. Targeting the Limits of Laser Doppler Vibrometry. 2005.

    [45] [45] Siegmund G. Sources of measurement error in laser Doppler vibrometers and proposal for unified specifications. Presented at the Eighth International Conference on Vibration Measurements by Laser Techniques. Ancona: Advances and Applications; 2008. 70980Y. .

    [49] [49] Solmates B.V., website: http://www.solmates-pld.com

    [50] [50] Blank DHA, Dekkers M, Rijnders G. Pulsed laser deposition in Twente: from research tool towards industrial deposition. J Phys Appl Phys. 2014;47(3);034006. .

    [51] [51] Kleinert M, et al. Photonic integrated devices and functions on hybrid polymer platform. Presented at the SPIE OPTO. San Francisco, California; 2017. p. 100981A. .

    [53] [53] Polytec GmbH., website: https://www.polytec.com/

    [54] [54] Dekkers M, et al. The significance of the piezoelectric coefficient d31,eff determined from cantilever structures. J Micromechanics Microengineering. 2013;23(2):025008. .

    [55] [55] Shekhar S, et al. Silicon Photonics - Roadmapping the Next Generation. 2023.

    [56] [56] Raptakis A, et al. Fully integrated Laser Doppler Vibrometer (LDV) based on hybrid 3D integration of silicon nitride and polymer photonic circuits with operation in the kHz regime. In Garcia-Blanco SM, Cheben P, editors. Integrated Optics: Devices, Materials, and Technologies XXVII. San Francisco: SPIE; 2023. p. 15. .

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    Adam Raptakis, Lefteris Gounaridis, Jörn P. Epping, Thi Lan Anh Tran, Thomas Aukes, Moritz Kleinert, Madeleine Weigel, Marco Wolfer, Alexander Draebenstedt, Christos Tsokos, Panos Groumas, Efstathios Andrianopoulos, Nikos Lyras, Dimitrios Nikolaidis, Elias Mylonas, Nikolaos Baxevanakis, Roberto Pessina, Erik Schreuder, Matthijn Dekkers, Volker Seyfried, Norbert Keil, René G. Heideman, Hercules Avramopoulos, Christos Kouloumentas. Integrated heterodyne laser Doppler vibrometer based on stress-optic frequency shift in silicon nitride[J]. PhotoniX, 2023, 4(1): 30

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    Paper Information

    Category: Research Articles

    Received: Apr. 28, 2023

    Accepted: Aug. 8, 2023

    Published Online: Dec. 14, 2023

    The Author Email: Raptakis Adam (arap@mail.ntua.gr)

    DOI:10.1186/s43074-023-00105-4

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