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Photonics Research, Volume. 12, Issue 8, 1730(2024)

High-performance and wavelength-transplantable on-chip Fourier transform spectrometer using MEMS in-plane reconfiguration

Heng Chen1,2、†, Hui Zhang3、†, Jing Zhou1,2, Chen Ma1,2, Qian Huang1,2, Hanxing Wang1,2, Qinghua Ren1,2, Nan Wang1,2, Chengkuo Lee4,5, and Yiming Ma1,2、*
Author Affiliations
  • 1School of Microelectronics, Shanghai University, Shanghai 201800, China
  • 2Shanghai Collaborative Innovation Center of Intelligent Sensing Chip Technology, Shanghai University, Shanghai 201800, China
  • 3Department of Electrical and Electronic Engineering, The Hong Kong Polytechnic University, Hong Kong 999077, China
  • 4Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore
  • 5Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore
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    Heng Chen, Hui Zhang, Jing Zhou, Chen Ma, Qian Huang, Hanxing Wang, Qinghua Ren, Nan Wang, Chengkuo Lee, Yiming Ma, "High-performance and wavelength-transplantable on-chip Fourier transform spectrometer using MEMS in-plane reconfiguration," Photonics Res. 12, 1730 (2024)

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    Paper Information

    Category: Silicon Photonics

    Received: Feb. 12, 2024

    Accepted: May. 22, 2024

    Published Online: Jul. 30, 2024

    The Author Email: Yiming Ma (yimingma@shu.edu.cn)

    DOI:10.1364/PRJ.521439

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology