Laser-induced defects in optical multilayer coatings by the spatial resolved method

Chong Shan; Yuanan Zhao; Yanqi Gao; Xiaohui Zhao; Guohang Hu; Weixin Ma; Jianda Shao

doi:10.3788/COL201917.031403

Chinese Optics Letters, Volume. 17, Issue 3, 031403(2019)

Laser-induced defects in optical multilayer coatings by the spatial resolved method

Chong Shan¹, Yuanan Zhao^2,3、*, Yanqi Gao^1,4, Xiaohui Zhao¹, Guohang Hu², Weixin Ma¹, and Jianda Shao^2、**

Author Affiliations

¹Shanghai Institute of Laser Plasma, China Academy of Engineering Physics, Shanghai 201800, China

²Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

³State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

⁴IFSA Collaborative Innovation Center, Shanghai Jiao Tong University, Shanghai 200240, China

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Figures & Tables(11)

Fig. 1. Schematic diagram of spatial resolved damage testing system.

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Fig. 2. Nd:YAG laser beam position at the wavelength of 355 nm with $0.5 J / {cm}^{2}$ laser peak fluence in (a) the beam profiler and (b) the CCD camera. The silver film was tested for beam position calibration.

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Fig. 3. (a) Recorded picture of the sample before laser irradiation. (b) Defect damage position in the Gaussian beam after laser irradiation at the wavelength of 355 nm with $26.4 J / {cm}^{2}$ peak fluence. The triple frequency splitter was tested for the defect damage threshold. The elliptical shadow with rings around it in the middle of the image is illumination light for observing the defect damage position in the CCD camera.

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Fig. 4. Transmittance spectrum of the multilayer coating prepared via reactive e-beam evaporation.

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Fig. 5. SEM images of defect damages: class A was irradiated by the 355 nm laser with fluence of (a) $5.69 J / {cm}^{2}$ and (b) $7.16 J / {cm}^{2}$ , respectively; class B was irradiated by the 355 nm laser with the fluence of (c) $8.33 J / {cm}^{2}$ and (d) $7.62 J / {cm}^{2}$ , respectively.

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Fig. 6. Electric field of the triple frequency splitter by the 355 nm laser.

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Fig. 7. (a), (b) SEM images and (c),(d) FIB images: class B defect damage morphology of the triple frequency splitter by the 355 nm laser irradiation with the fluence of (a) $9.15 J / {cm}^{2}$ and (b) $6.81 J / {cm}^{2}$ , respectively; (c) and (d) recorded depth information of class B defect damage morphology.

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Fig. 8. SEM images of defect damages: class A was irradiated by the 532 nm laser with the fluence of (a) $5.26 J / {cm}^{2}$ and (b) $7.12 J / {cm}^{2}$ , respectively; class B was irradiated by the 355 nm laser with the fluence of (c) $8.93 J / {cm}^{2}$ and (d) $13.66 J / {cm}^{2}$ , respectively.

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Fig. 9. Electric field of the triple frequency splitter irradiated by the 532 nm laser.

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Table 1. Results of the Defect Damage Threshold of the Triple Frequency Splitter by Only the 355 nm Laser
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Table 1. Results of the Defect Damage Threshold of the Triple Frequency Splitter by Only the 355 nm Laser
Class 1-on-1 Method ( $J / {cm}^{2}$ ) Spatial Resolved Method ( $J / {cm}^{2}$ )
Class A 9.61 1.63
Class B 15.73 4.38

Table 2. Result of the Defect Damage Threshold of the Triple Frequency Splitter by Only the 532 nm Laser
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Table 2. Result of the Defect Damage Threshold of the Triple Frequency Splitter by Only the 532 nm Laser
Class 1-on-1 Method ( $J / {cm}^{2}$ ) Spatial Resolved Method ( $J / {cm}^{2}$ )
Class C 14.17 5.26
Class D 19.36 8.33

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Chong Shan, Yuanan Zhao, Yanqi Gao, Xiaohui Zhao, Guohang Hu, Weixin Ma, Jianda Shao, "Laser-induced defects in optical multilayer coatings by the spatial resolved method," Chin. Opt. Lett. 17, 031403 (2019)

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Paper Information

Category: Lasers and Laser Optics

Received: Sep. 29, 2018

Accepted: Dec. 20, 2018

Published Online: Mar. 8, 2019

The Author Email: Yuanan Zhao (yazhao@siom.ac.cn), Jianda Shao (jdshao@siom.ac.cn)

DOI:10.3788/COL201917.031403

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Results of the Defect Damage Threshold of the Triple Frequency Splitter by Only the 355 nm Laser

Table 1. Results of the Defect Damage Threshold of the Triple Frequency Splitter by Only the 355 nm Laser

Table 2. Result of the Defect Damage Threshold of the Triple Frequency Splitter by Only the 532 nm Laser

Table 2. Result of the Defect Damage Threshold of the Triple Frequency Splitter by Only the 532 nm Laser