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Acta Optica Sinica, Volume. 33, Issue 2, 231003(2013)

Microstructure and Luminous Property of Multilayer SiNx/Si/SiNx Thin Films

Lin Juan1,2、*, Yang Peizhi1,2, and Hua Qilin1,2
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  • 2[in Chinese]
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    Article index updated: Mar. 10, 2025

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    Lin Juan, Yang Peizhi, Hua Qilin. Microstructure and Luminous Property of Multilayer SiNx/Si/SiNx Thin Films[J]. Acta Optica Sinica, 2013, 33(2): 231003

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    Paper Information

    Category: Thin Films

    Received: Aug. 3, 2012

    Accepted: --

    Published Online: Dec. 31, 2012

    The Author Email: Juan Lin (linjuanlinjuan@126.com)

    DOI:10.3788/aos201333.0231003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology