Experimental Study on Removal of Surface Defect Layer of Fused Quartz by Laser Plasma

Zhun Xie; Rong Qiu; Jinfang Shi; Qiang Zhou; Liqing Zhang; Lei Zhou; Decheng Guo; Jianxin Wang

doi:10.3788/CJL241226

Chinese Journal of Lasers, Volume. 52, Issue 4, 0402204(2025)

Experimental Study on Removal of Surface Defect Layer of Fused Quartz by Laser Plasma

Zhun Xie¹, Rong Qiu^1,2、*, Jinfang Shi^1,3, Qiang Zhou^1,2, Liqing Zhang², Lei Zhou^1,2, Decheng Guo^1,2, and Jianxin Wang^1,2

Author Affiliations

¹Joint Laboratory for Extreme Conditions Material Properties, Southwest University of Science and Technology, Mianyang 621010, Sichuan , China

²School of Mathematics and Physics, Southwest University of Science and Technology, Mianyang 621010, Sichuan , China

³Key Laboratory of Testing Technology for Manufacturing Process, Ministry of Education, Southwest University of Science and Technology, Mianyang 621010, Sichuan , China

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Figures & Tables(8)

Fig. 1. Experimental system

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Fig. 2. Two dimensional contours of sample after surface defect layer removal when sample moves along Z-axis at different rates

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Fig. 3. AFM images of sample after surface defect layer removal when sample moves along Z-axis at different rates. (a) Original surface of sample; surface after surface defect layer removal when movement rate is (b) 2, (c) 5, and (d) 10 $μ m \cdot s^{- 1}$ , respectively; (e) SEM image of Fig. 3(a); (f) SEM image of Fig. 3(c)

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Fig. 4. Damage rule of fused quartz element under 3ω laser irradiation after surface defect layer removal.(a) Laser-induced damage thresholds for surface defect layer removal at different removal depths; (b) damage probability curves of sample under 3ω laser irradiation after surface defect layer removal at different movement rates

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Fig. 5. Damage morphologies of fused quartz element under 3ω laser irradiation before and after surface defect layer removal. (a) Before removal; (b) after removal

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Table 1. Removal depths and RMS surface roughness values when sample moves at different rates
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Table 1. Removal depths and RMS surface roughness values when sample moves at different rates
Movement rate /（μm·s^-1） 2 5 7 10 20 50 100 160
Removal depth /nm 700.0 300.0 182.0 153.0 53.0 12.0 13.5 10.0
RMS surface roughness /nm 6.1 0.6 1.2 1.5 1.8 1.9 2.4 1.7

Table 2. Relationship between LIDT and sample movement rate
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Table 2. Relationship between LIDT and sample movement rate
Movement rate /（μm·s^-1） 2 5 7 10 20 50 100 160
LIDT /（J·cm^-2） 17.4 29.8 28.7 24.4 24.9 23.8 20.6 20.1

Table 3. Relevant parameters required for calculating pressure and temperature of detonation wave
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Table 3. Relevant parameters required for calculating pressure and temperature of detonation wave
Parameter $γ$ ^［22］ $ρ_{0}$ /（ $k g \cdot m^{- 3}$ ） $R$ ^［19］
Value 1.2 1.29 0.997

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Zhun Xie, Rong Qiu, Jinfang Shi, Qiang Zhou, Liqing Zhang, Lei Zhou, Decheng Guo, Jianxin Wang. Experimental Study on Removal of Surface Defect Layer of Fused Quartz by Laser Plasma[J]. Chinese Journal of Lasers, 2025, 52(4): 0402204

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Paper Information

Category: Laser Surface Machining

Received: Sep. 23, 2024

Accepted: Nov. 6, 2024

Published Online: Jan. 20, 2025

The Author Email: Qiu Rong (43951700@qq.com)

DOI:10.3788/CJL241226

CSTR:32183.14.CJL241226

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Removal depths and RMS surface roughness values when sample moves at different rates

Table 1. Removal depths and RMS surface roughness values when sample moves at different rates

Table 2. Relationship between LIDT and sample movement rate

Table 2. Relationship between LIDT and sample movement rate

Table 3. Relevant parameters required for calculating pressure and temperature of detonation wave

Table 3. Relevant parameters required for calculating pressure and temperature of detonation wave