Acta Optica Sinica, Volume. 28, Issue 6, 1096(2008)
Evaluation of Step Height Standard Using Nano-Measuring Machine Integrated with Focusing Sensor
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Guo Tong, Chen Jinping, Fu Xing, Hu Xiaotang. Evaluation of Step Height Standard Using Nano-Measuring Machine Integrated with Focusing Sensor[J]. Acta Optica Sinica, 2008, 28(6): 1096
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