Piezoelectrics & Acoustooptics, Volume. 46, Issue 3, 339(2024)

Research on Au-Sn Bonding for Wafer-Level Packaging of FBAR Filters

JIN Zhong1, ZHANG Jiqin2, LYU Junhao1, RUAN Wenbiao2, LIU Ya1, ZENG Jingyi1, SUN Mingbao1, and SUN Yanhong1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    As a passive, small-sized, and high-power-tolerant device, the film bulk acoustic resonator (FBAR) has been widely used in radio frequency signal processing.Wafer-level hermetic packaging represents miniaturized packaging and plays a critical role in various high-reliability applications.Both gold-gold and gold-tin bonding are widely used in FBAR hermetic wafer-level packaging.However, gold-tin bonding has a more straight forward implementation process.Therefore, this study investigates the application of gold-tin bonding in hermetic wafer-level packaging.Under the condition of ensuring bonding strength, 3 GHz filter samples were produced.The experimental results demonstrated identical perfomances with all samples passing the reliability tests.

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    JIN Zhong, ZHANG Jiqin, LYU Junhao, RUAN Wenbiao, LIU Ya, ZENG Jingyi, SUN Mingbao, SUN Yanhong. Research on Au-Sn Bonding for Wafer-Level Packaging of FBAR Filters[J]. Piezoelectrics & Acoustooptics, 2024, 46(3): 339

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    Paper Information

    Received: Jan. 12, 2023

    Accepted: --

    Published Online: Aug. 29, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.03.011

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