Microelectronics, Volume. 52, Issue 3, 484(2022)
Fabrication and Testing of a Ring Electrostatic Resonator Based on Anode Bonding
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WANG Junduo, SHEN Wenjiang. Fabrication and Testing of a Ring Electrostatic Resonator Based on Anode Bonding[J]. Microelectronics, 2022, 52(3): 484
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Received: Sep. 14, 2021
Accepted: --
Published Online: Jan. 18, 2023
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