Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Chinese Optics Letters, Volume. 15, Issue 6, 062201(2017)

Versatile nanosphere lithography technique combining multiple-exposure nanosphere lens lithography and nanosphere template lithography

Yonghui Zhang1,2, Zihui Zhang1,2, Chong Geng1,2, Shu Xu1,2, Tongbo Wei3、*, and Wen'gang Bi1,2
Author Affiliations
  • 1Institute of Micro-Nano Photoelectron and Electromagnetic Technology Innovation, School of Electronics and Information Engineering, Hebei University of Technology, Tianjin 300401, China
  • 2Key Laboratory of Electronic Materials and Devices of Tianjin, Tianjin 300401, China
  • 3Semiconductor Lighting Technology Research and Development Center, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
    • show less
    Full TextGet PDF
    Figures&Tables (7)
    Equations (0)
    References (28)
    Cited By (9)
    Tools
    Paper Information
    Topics
    References(28)

    [1] Z. Dai, Y. Li, G. Duan, L. Jia, W. Cai. Acsnano, 6, 6706(2012).

    [2] S. M. Yang, S. G. Jang, D. G. Choi, S. Kim, H. K. Yu. Small, 2, 458(2006).

    [3] X. Zhao, B. M. Sanchez, P. J. Dobson, P. S. Grant. Nanoscale, 3, 839(2011).

    [4] Y. Chen, Z. Li. Chin. Opt. Lett., 13, 020501(2015).

    [5] J. Ye, J. A. Hutchison, H. Uji-i, J. Hofkens, L. Lagae, G. Maes, G. Borghs, P. Van Dorpe. Nanoscale, 4, 1606(2012).

    [6] Z. A. Lewicka, Y. Li, A. Bohloul, W. W. Yu, V. L. Colvin. Nanotechnology, 24, 115303(2013).

    [7] B. Ni, L. Huang, J. Ding, G. Li, X. Chen, W. Lu. Opt. Commun., 237, 298(2013).

    [8] Z. Fang, Z. Liu, Y. Wang, P. M. Ajayan, P. Nordlander, N. J. Halas. Nano Lett., 12, 3808(2012).

    [9] J. Cheng, N. Yan. Chin. Opt. Lett., 13, 082201(2015).

    [10] C. L. Haynes, R. P. Duyne. J. Phys. Chem. B, 105, 5599(2001).

    [11] J. Zhang, Y. Li, X. Zhang, B. Yang. Adv. Mater., 22, 4249(2010).

    [12] X. Ye, L. Qi. Nano Today, 6, 608(2011).

    [13] P. Zhu, N. Tansu. Photon. Res., 3, 184(2015).

    [14] Z. A. Lewicka, A. Bahloul, W. W. Yu, V. L. Colvin. Nanoscale, 5, 11071(2013).

    [15] A. Horrer, C. Schäfer, K. Broch, D. A. Gollmer, J. Rogalski, J. Fulmes, D. Zhang, A. J. Meixner, F. Schreiber, D. P. Kern, M. Fleischer. Small, 9, 3987(2013).

    [16] X. D. Wang, E. Graugnard, J. S. King, Z. L. Wang, C. J. Summers. Nano Lett., 4, 2223(2004).

    [17] Z. Li, P. Liu, Y. Liu, W. Chena, G. Wanga. Nanoscale, 3, 2743(2011).

    [18] S. Cataldo, J. Zhao, F. Neubrech, B. Frank, C. Zhang, P. V. Braun, H. Giessen. Acsnano, 6, 979(2012).

    [19] K. H. Li, Z. Ma, H. W. Choi. Appl. Phys. Lett., 100, 141101(2012).

    [20] X. Wang, S. Xu, M. Cong, H. Li, Y. Gu, W. Xu. Small, 8, 972(2012).

    [21] G. Liu, X. Li, W. Wang, F. Zhou, G. Duan, Y. Li, Z. Xu, W. Cai. Small, 10, 2374(2014).

    [22] W. Wu, A. Katsnelson, O. G. Memis, H. Mohseni. Nanotechnology, 18, 485302(2007).

    [23] Y. C. Chang, H. Ch. Chung, S. C. Lu, T. F. Guo. Nanotechnology, 24, 095302(2013).

    [24] T. B. Wei, K. Wu, D. Lan, Q. F. Yan, Y. Chen, C. X. Du, J. X. Wang, Y. P. Zeng, J. M. Li. Appl. Phys. Lett., 101, 211111(2012).

    [25] T. Y. Jeon, H. C. Jeon, S. Y. Lee, T. S. Shim, J. D. Kwon, S. G. Park, S. M. Yang. Adv. Mater., 26, 1422(2014).

    [26] M. Retsch, Z. Zhou, S. Rivera, M. Kappl, X. S. Zhao, U. Jonas, Q. Li. Macromol. Chem. Phys., 210, 230(2009).

    [27] Y. J. Zhang, W. Lib, K. J. Chen. J. Alloys Compd., 450, 512(2008).

    [28] C. Geng, L. Zheng, J. Yu, Q. Yan, T. Wei, X. Wang, D. Shen. J. Mater. Chem., 22, 22678(2012).

    CLP Journals

    [1] Huijuan Xia, Shumin Yang, Liansheng Wang, Jun Zhao, Chaofan Xue, Yanqing Wu, Renzhong Tai, "Nonuniform self-imaging of achromatic Talbot lithography," Chin. Opt. Lett. 17, 062201 (2019)

    Cited By

    [1] Kesheng Guo, Yanzhi Wang, Ruiyi Chen, Meiping Zhu, Kui Yi, Hongbo He, Jianda Shao. Effects of structural defects on laser-induced damage of 355-nm high-reflective coatings sputtered on etched substrates. Optical Materials, 89, 173(2019).

    Tools

    Get Citation

    Copy Citation Text

    Yonghui Zhang, Zihui Zhang, Chong Geng, Shu Xu, Tongbo Wei, Wen'gang Bi, "Versatile nanosphere lithography technique combining multiple-exposure nanosphere lens lithography and nanosphere template lithography," Chin. Opt. Lett. 15, 062201 (2017)

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: Optical Design and Fabrication

    Received: Jan. 23, 2017

    Accepted: Feb. 17, 2017

    Published Online: Jul. 20, 2018

    The Author Email: Tongbo Wei (tbwei@semi.ac.cn)

    DOI:10.3788/COL201715.062201

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology