UV Laser Homogenization Technology Based on Microlens Array

Fig. 1. Excimer laser intensity distribution and its pseudo-mode representation. (a) Cross-sectional view; (b) short axis direction; (c) long axis direction

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Fig. 2. Schematic of microlens array homogenization principle

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Fig. 3. Intensity distribution of the homogenized beam. (a) Cross-sectional view; (b) short axis direction; (c) long axis direction

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Fig. 4. Intensity distribution of the homogenized beam at different defocus. (a) $Z_{d e f o c u s} = 1 m m$ ; (b) $Z_{d e f o c u s} = 3 m m$

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Fig. 5. Intensity distribution of the homogenized beam at different array spacings. (a) $d_{12} = 15 m m$ ; (b) $d_{12} = 17.5 m m$ ; (c) $d_{12} = 22.5 m m$ ; (d) $d_{12} = 25 m m$

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Fig. 6. Schematic of misalignment for microlens array homogenization system

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Fig. 7. Intensity distribution of homogenized beam at different misalignments. (a) Decenter; (b) tilt; (c) decenter and tilt

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Fig. 8. Experimental results and corresponding simulation results for misaligned microlens arrays at different defocus distances. (a) $Z_{d e f o c u s} = 1 m m$ ; (b) $Z_{d e f o c u s} = 4 m m$ ; (c) $Z_{d e f o c u s} = 7 m m$ ; (d) $Z_{d e f o c u s} = 10 m m$

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Table 1. Relationship between spatial coherence length and mode number
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Table 1. Relationship between spatial coherence length and mode number
$σ_{x} / m m$ $M$ $σ_{y} / m m$ $N$
4 12 2 28
0.4 50 0.2 205

Table 2. Influence of defocus on uniformity and steepness of beam

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Table 2. Influence of defocus on uniformity and steepness of beam

$Z_{d e f o c u s} / m m$	$δ_{x} / %$	${E_{T R -}}_{x} / m m^{- 1}$	$δ_{y} / %$	${E_{T R -}}_{y} / m m^{- 1}$
1	0.17	13.22	0.05	3.76
2	0.52	6.99	0.05	2.19
3	0.58	4.72	0.05	1.54
4	0.42	3.81	0.08	1.17
5	5.58	3.00	0.03	0.95
6	0.20	2.51	0.06	0.80
7	0.28	2.11	0.04	0.69
8	5.53	1.91	0.04	0.63
9	0.23	1.71	0.05	0.54
10	0.20	1.56	0.05	0.50

Table 3. Influence of decenter and tilt on beam uniformity
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Table 3. Influence of decenter and tilt on beam uniformity
$Δ d / m m$ $Δ θ / (^{o})$ $δ_{x} / %$ $δ_{y} / %$
0.1 0.1 0.38 0.05
0.2 0.47 0.06
0.3 0.65 0.07
0.4 0.86 0.10
0.5 1.21 0.36
0.6 1.97 1.05
0.2 0.1 0.85 0.09
0.2 1.14 0.29
0.3 1.79 0.94
0.3 0.1 3.64 2.24

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Xin Zheng, Shenyu Dai, Yuying Zhang, Shuai Zhao. UV Laser Homogenization Technology Based on Microlens Array[J]. Acta Optica Sinica, 2023, 43(10): 1014005

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