Semiconductor Optoelectronics, Volume. 43, Issue 5, 861(2022)

Study on Electrical Properties of IGZO-TFT by Aqueous Solution Method

CHONG Le1, LI Xuyang1, CAI Changlong1, LIANG Haifeng1, PEI Xule1, MI Qian1, and YU Zhinong2
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(13)

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    [7] [7] Park J W, Kang B H, Kim H J. A review of low-temperature solution-processed metal oxide thin-film transistors for flexible electronics[J]. Advanced Functional Materials, 2020, 30(20): 1904632.

    [8] [8] Kim M G, Kanatzidis M G, Facchetti A, et al. Low-temperature fabrication of high-performance metal oxide thin-film electronics via combustion processing[J]. Nature Materials, 2011, 10(5): 382-388.

    [9] [9] Hwang Y H, Seo J S, Yun J M, et al. An ‘aqueous route’ for the fabrication of low-temperature-processable oxide flexible transparent thin-film transistors on plastic substrates[J]. NPG Asia Materials, 2013, 5(4): e45.

    [10] [10] Kim Y H, Heo J S, Park S, et al. Flexible metal-oxide devices made by room-temperature photochemical activation of sol-gel films[J]. Nature, 2012, 489(7414): 128-132.

    [11] [11] Li X, Cheng J, Chen Y, et al. Low-temperature aqueous route processed indium oxide thin-film transistors by NH3 plasma-assisted treatment[J]. IEEE Trans. on Electron Devices, 2019, 66(3): 1303-1307.

    [12] [12] Zhang W P, Chen S, Qian S B, et al. Effects of thermal annealing on the electrical characteristics of In-Ga-Zn-O thin-film transistors with Al2O3 gate dielectric[J]. Semiconductor Science and Technology, 2015, 30(1): 15003.

    [13] [13] Chen W T, Lo S Y, Kao S C, et al. Oxygen-dependent instability and annealing/passivation effects in amorphous In-Ga-Zn-O thin-film transistors[J]. IEEE Electron Device Lett., 2011, 32(11): 1552-1554.

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    CHONG Le, LI Xuyang, CAI Changlong, LIANG Haifeng, PEI Xule, MI Qian, YU Zhinong. Study on Electrical Properties of IGZO-TFT by Aqueous Solution Method[J]. Semiconductor Optoelectronics, 2022, 43(5): 861

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    Paper Information

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    Received: May. 6, 2022

    Accepted: --

    Published Online: Jan. 27, 2023

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2022050601

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