Chinese Optics Letters, Volume. 2, Issue 6, 06364(2004)
Influence of deposition rate on the properties of ZrO2 thin films prepared in electron beam evaporation method
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Dongping Zhang, Meiqiong Zhan, Ming Fang, Hongbo He, Jianda Shao, Zhengxiu Fan, "Influence of deposition rate on the properties of ZrO2 thin films prepared in electron beam evaporation method," Chin. Opt. Lett. 2, 06364 (2004)