ZrO2 thin films were prepared in electron beam thermal evaporation method. And the deposition rate changed from 1.3 to6.3 nm/s in our study. X-ray diffractometer and spectrophotometer were employed to characterize the films. X-raydiffraction (XRD) spectra pattern shows that films structure changed from amorphous to polycrystalline with deposition rate increasing. The results indicate that internal stresses of the films are compressive in most case. Thin films deposited in our study are inhomogeneous, and the inhomogeneity is enhanced with the deposition rate increasing.