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Laser & Optoelectronics Progress, Volume. 58, Issue 23, 2312005(2021)

Research on Stereo Grating Angle Sensor System

Wenying Zhang1,2, Haoran Zhu3、*, and Nan Li1,2
Author Affiliations
  • 1Institute for Interdisciplinary Quantum Information Technology, Jilin Engineering Normal University, Changchun , Jilin 130052, China
  • 2Jilin Engineering Laboratory for Quantum Information Technology, Changchun , Jilin 130052, China
  • 3School of Electronics and Information Engineering, Changchun University of Science and Technology, Changchun , Jilin 130022, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (10)
    Equations (11)
    References (15)
    Cited By (1)
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    Figures & Tables(10)
    Schematic of grating motion

    Fig. 1. Schematic of grating motion

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    Concept diagram of stereo grating angle sensor

    Fig. 2. Concept diagram of stereo grating angle sensor

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    Layout diagram of stereo grating multi-head reading

    Fig. 3. Layout diagram of stereo grating multi-head reading

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    Schematic of stereo grating angle sensor

    Fig. 4. Schematic of stereo grating angle sensor

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    Schematic of experimental system

    Fig. 5. Schematic of experimental system

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    Physical map of stereo grating angle sensor with uniform distribution

    Fig. 6. Physical map of stereo grating angle sensor with uniform distribution

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    Angle error curve of stereo grating angle sensor with uniform distribution

    Fig. 7. Angle error curve of stereo grating angle sensor with uniform distribution

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    Layout diagram of end reading head

    Fig. 8. Layout diagram of end reading head

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    Physical map of stereo grating angle sensor with non-uniform distribution

    Fig. 9. Physical map of stereo grating angle sensor with non-uniform distribution

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    Angle error curve of stereo grating angle sensor with non-uniform distribution

    Fig. 10. Angle error curve of stereo grating angle sensor with non-uniform distribution

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    Wenying Zhang, Haoran Zhu, Nan Li. Research on Stereo Grating Angle Sensor System[J]. Laser & Optoelectronics Progress, 2021, 58(23): 2312005

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Mar. 29, 2021

    Accepted: Jul. 13, 2021

    Published Online: Nov. 18, 2021

    The Author Email: Haoran Zhu (zwyzwy8866@163.com)

    DOI:10.3788/LOP202158.2312005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology