[1] Li K, Zhu J P, Duan Q H et al. Ultra-broadband Bragg concave diffraction grating designs on 220-nm SOI for wavelength demultiplexing[J]. Optics Express, 29, 30259-30271(2021).

[2] Lu Z X, Li P L, Wang H R. Multi-service layered WDM-ROF system with optional frequency millimeter wave based on optical frequency comb[J]. Chinese Journal of Lasers, 50, 1006002(2023).

[3] Li J X, Gan T Y, Bai B J et al. Massively parallel universal linear transformations using a wavelength-multiplexed diffractive optical network[J]. Advanced Photonics, 5, 016003(2023).

[4] Tan Z W, Lu C. Optical fiber communication technology: present status and prospect[J]. Strategic Study of CAE, 22, 100-107(2020).

[5] Yang X W, Wei Y, Long J Y et al. Experimental demonstration of 100 gbaud delta-sigma modulation signal transmission over O-band[J]. Acta Optica Sinica, 43, 2006004(2023).

[6] Chen X, Milosevic M M, Stanković S et al. The emergence of silicon photonics as a flexible technology platform[J]. Proceedings of the IEEE, 106, 2101-2116(2018).

[7] Shen X H, Chen B, Zhu Y et al. Silicon photonic integrated circuits and its application in data center[J]. Proceedings of SPIE, 11763, 1176380(2021).

[8] Zhang Q, He Z H, Xie Z W et al. Diffractive optical elements 75 years on: from micro-optics to metasurfaces[J]. Photonics Insights, 2, R09(2023).

[9] Pathak S, Dumon P, Van Thourhout D et al. Comparison of AWGs and echelle gratings for wavelength division multiplexing on silicon-on-insulator[J]. IEEE Photonics Journal, 6, 4900109(2014).

[10] Feng D Z, Qian W, Liang H et al. High-speed receiver technology on the SOI platform[J]. IEEE Journal of Selected Topics in Quantum Electronics, 19, 3800108(2013).

[11] Pello J, Muneeb M, Keyvaninia S et al. Planar concave grating demultiplexers on an InP-membrane-on-silicon photonic platform[J]. IEEE Photonics Technology Letters, 25, 1969-1972(2013).

[12] Jiang G M, Baig S, Lu H et al. Planar concave grating wavelength demultiplexers with flattened spectral response based on SU-8 polymer waveguides[J]. Optical Engineering, 55, 037104(2016).

[13] Li C G, Xiong B, Chu T. Polarization-independent wavelength demultiplexer based on a single etched diffraction grating device[J]. Communications Engineering, 2, 4(2023).

[14] Fu X, Le W R, Wang Y et al. Research progress on performance improvement of spectrograph based on concave grating[J]. Laser Technology, 47, 757-765(2023).

[15] Stavdas A, Bayvel P, Midwinter J E. Design and performance of concave holographic gratings for applications as multiplexers/demultiplexers for wavelength routed optical networks[J]. Optical Engineering, 35, 2816-2823(1996).

[16] Brouckaert J, Bogaerts W, Dumon P et al. Planar concave grating demultiplexer fabricated on a nanophotonic silicon-on-insulator platform[J]. Journal of Lightwave Technology, 25, 1269-1275(2007).

[17] He J J, Lamontagne B, Delage A et al. Monolithic integrated wavelength demultiplexer based on a waveguide Rowland circle grating in InGaAsP/lnP[J]. Journal of Lightwave Technology, 16, 631-638(1998).

[18] Soole J B D, Scherer A, LeBlanc H P et al. Monolithic InP/InGaAsP/InP grating spectrometer for the 1.48-1.56 μm wavelength range[J]. Applied Physics Letters, 58, 1949-1951(1991).

[19] Feng D Z, Qian W, Liang H et al. Fabrication insensitive echelle grating in silicon-on-insulator platform[J]. IEEE Photonics Technology Letters, 23, 284-286(2011).

[20] Shen A, Qiu C, Hu T et al. An eight-channel 400 GHz-spacing etched diffraction grating multi/demultiplexer on a nanophotonic silicon-on-insulator platform[J]. Chinese Physics Letters, 30, 084204(2013).

[21] Lycett R J, Gallagher D F G, Brulis V J. Perfect chirped echelle grating wavelength multiplexor: design and optimization[J]. IEEE Photonics Journal, 5, 2400123(2013).

[22] Doménech J D, Baños R, Muñoz P. Echelle gratings with metal reflectors in generic thick silicon technology[EB/OL]. https://arxiv.org/abs/1506.05945

[23] Pommarede X, Hassan K, Billondeau P et al. 16 × 100 GHz echelle grating-based wavelength multiplexer on silicon-on-insulator platform[J]. IEEE Photonics Technology Letters, 29, 493-495(2017).

[24] Horst F, Green W M J, Offrein B J et al. Silicon-on-insulator echelle grating WDM demultiplexers with two stigmatic points[J]. IEEE Photonics Technology Letters, 21, 1743-1745(2009).

[25] Sciancalepore C, Lycett R J, Dallery J A et al. Low-crosstalk fabrication-insensitive echelle grating demultiplexers on silicon-on-insulator[J]. IEEE Photonics Technology Letters, 27, 494-497(2015).

[26] Zhang Y L, Schneider M, Karnick D et al. Low-loss and robust DWDM echelle grating (de-) multiplexers in SOI technology[J]. Proceedings of SPIE, 10914, 109140J(2019).

[27] Melati D, Verly P G, Delâge A et al. Compact and low crosstalk echelle grating demultiplexer on silicon-on-insulator technology[J]. Electronics, 8, 687(2019).

[28] Wang Y, Harjanne M, Bhat S et al. 40 100 GHz spacing low-crosstalk Mux/Demux based on cascaded planar echelle gratings on 3-μm silicon platform[C](1).

[29] Chen X, Wu A M, Qiu C et al. Etching diffraction grating of silicon substrate and design of flatten[J]. Laser Technology, 41, 361-366(2017).

[30] He J J, Koteles E S, Lamontagne B et al. Integrated polarization compensator for WDM waveguide demultiplexers[J]. IEEE Photonics Technology Letters, 11, 224-226(1999).

[31] Zhu N, Song J, Wosinski L et al. Design of a polarization-insensitive echelle grating demultiplexer based on silicon nanophotonic wires[J]. IEEE Photonics Technology Letters, 20, 860-862(2008).

[32] Feng D Z, Qian W, Liang H et al. Novel fabrication tolerant flat-top demultiplexers based on etched diffraction gratings in SOI[C], 386-388(2008).

[33] Zhu N. Proposal of a polarization-insensitive echelle grating demultiplexer based on a nanophotonic silicon-on-insulator platform through a dual-grating system[J]. Optics Letters, 35, 1599-1601(2010).

[34] Wang Y, Calabretta N. Novel polarization insensitive fold-back 40-channels 100 GHz spacing planar echelle grating for wavelength selective switches[C](2022).

[35] Song J, Shi Z M, He S L. A pre-shaped MMI input structure in etched diffraction grating for flat-top spectral response with low crosstalk[J]. Chinese Journal of Semiconductors, 25, 195-199(2004).

[36] Sheng Z Y, He S L, Lou L F. Design and simulation of a planar integrated demultiplexer for coarse WDM[J]. Optics Communications, 225, 95-100(2003).

[37] Kwon O K, Lee C W, Lee D H et al. InP-based polarization-insensitive planar waveguide concave grating demultiplexer with flattened spectral response[J]. ETRI Journal, 31, 228-230(2009).

[38] Le L L, Chu Y Y, Hu Z P et al. InP based echelle diffraction grating multiplexer with flat-passband[C](2017).

[39] Zhang Y L, Schneider M, Karnick D et al. A high-performance echelle grating de-multiplexer based on two stigmatic points and its flat-top solution[J]. Proceedings of SPIE, 11286, 112860Y(2020).