Piezoelectrics & Acoustooptics, Volume. 45, Issue 2, 195(2023)
Three-Dimensional Finite Element Analysis of Sensing Mechanism of Single-Axis MEMS Thermal Expansion Flow Gyro
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PIAO Linhua, LI Bei, TONG Jiacheng, ZHANG Yan. Three-Dimensional Finite Element Analysis of Sensing Mechanism of Single-Axis MEMS Thermal Expansion Flow Gyro[J]. Piezoelectrics & Acoustooptics, 2023, 45(2): 195
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Received: Jun. 8, 2022
Accepted: --
Published Online: Nov. 29, 2023
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