Chinese Journal of Lasers, Volume. 42, Issue 4, 403001(2015)

Effects of Femtosecond Laser Parameters on Hole Drilling of Silica Glass

Xing Songling1、*, Liu Lei1, Zou Guisheng1, Zhang Xueqian1, Bai Hailin1, and Y N1,2
Author Affiliations
  • 1[in Chinese]
  • 2Department of Mechatronics and Mechanical Engineering, University of Waterloo, Canada, N2L 3G1
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    References(18)

    [1] [1] C Rubbia, E Fermi. Corrosion news[J]. Materials and Corrosion, 2013, 64(11): 1039.

    [2] [2] An Ran. Femtosecond Laser Fabrication of Elements of Glass Microfluidic Chips[D]. Beijing: Peking University, 2006.

    [3] [3] Xia Bo, Jiang Lan, Wang Sumei, et al.. Femtosecond laser drilling of micro-holes[J]. Chinese J Lasers, 2013, 40(2): 0201001.

    [4] [4] Sun Siming, Sun Yunlu, Liu Dongxu, et al.. Protein functional devices manufactured by femtosecond laser direct writing[J]. Laser & Optoelectronics Progress, 2013, 50(8): 080003.

    [5] [5] Y L Sun, D X Liu, W F Dong, et al.. Tunable protein harmonic diffractive micro-optical elements[J]. Opt Lett, 2012, 37(14): 2973-2975.

    [6] [6] H Xia, J Wang, Y Tian, et al.. Ferrofluids for fabrication of remotely controllable micro-nanomachines by two-photon polymerization [J]. Advanced Materials, 2010, 22(29): 3204-3207.

    [7] [7] K Liu, Q Yang, Y Zhao, et al.. Three-dimensional metallic microcomponents achieved in fused silica by a femtosecond-laser-based microsolidifying process[J]. Microelectronic Engineering, 2014, 113: 93-97.

    [8] [8] A C Forsman, E H Lundgren, A L Dodell, et al.. Double-pulse format for improved laser drilling-Second pulse enhances both drilling speed and hole quality[J]. Photonics Spectra, 2007, 41(9): 72-+.

    [9] [9] I Miyamoto. Laser materials processing in Japan[J]. Laser Technik Journal, 2008, 5(3): 16-20.

    [10] [10] T Juhasz, L H Loesel, R M Kurtz, et al.. Corneal refractive surgery with femtosecond lasers[J]. IEEE Journal of Selected Topics in Quantum Electronics, 1999, 5(4): 902-910.

    [11] [11] A Heisterkamp, I Z Maxwell, E Mazur, et al.. Pulse energy dependence of subcellular dissection by femtosecond laser pulses[J]. Opt Express, 2005, 13(10): 3690-3696.

    [12] [12] Wei Di, Cheng Ping, Chen Xiangdong, et al.. Study on femtosecond laser processing of nonmetal vascular stent[J]. Laser & Optoelectronics Progress, 2013, 50(9): 091403.

    [13] [13] Wang Feng, Luo Jianjun, Li Ming. High-precision method of machining taper holes of diesel engine nozzle with femtosecond laser [J]. Acta Photonica Sinica, 2014, 43(4): 0414003.

    [14] [14] Lin Jindu, Wu Haizhu. The process development of laser in fine micro-hole[J]. Printed Circuit Information, 2014, (1): 26-29.

    [15] [15] C B Schaffer, A Brodeur, E Mazur. Laser-induced breakdown and damage in bulk transparent materials induced by tightly focused femtosecond laser pulses[J]. Measurement Science and Technology, 2001, 12(11): 1784.

    [16] [16] B N Chichkov, C Momma, S Nolte, et al.. Femtosecond, picosecond and nanosecond laser ablation of solids[J]. Applied Physics A, 1996, 63(2): 109-115.

    [18] [18] K H Leitz, B Redlingshofer, Y Reg, et al.. Metal ablation with short and ultrashort laser pulses[J]. Physics Procedia, 2011, 12: 230-238.

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    Xing Songling, Liu Lei, Zou Guisheng, Zhang Xueqian, Bai Hailin, Y N. Effects of Femtosecond Laser Parameters on Hole Drilling of Silica Glass[J]. Chinese Journal of Lasers, 2015, 42(4): 403001

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    Paper Information

    Category: laser manufacturing

    Received: Oct. 8, 2014

    Accepted: --

    Published Online: Mar. 25, 2015

    The Author Email: Songling Xing (xingsl14@mails.tsinghua.edu.cn)

    DOI:10.3788/cjl201542.0403001

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