Optical Technique, Volume. 49, Issue 6, 692(2023)

Differential confocal axial space measurement method based on five-dimensional auto-adjustment

CUI Mingtuo*, QIU Lirong, CUI Jian, and YANG Shuai
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  • [in Chinese]
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    References(5)

    [11] [11] Langehanenberg P, Dumitrescu E, Heinisch J, et al. Automated measurement of centering errors and relative surface distances for the optimized assembly of micro-optics[C]//Micromachining and Microfabrication Process Technology XVI. USA:SPIE,2011,7926:91-98.

    [15] [15] Zhao W Q, Tan J B, Qiu L R. Bipolar absolute differential confocal approach to higher spatial resolution[J]. Optics express,2004,12(21):5013-5021.

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    CUI Mingtuo, QIU Lirong, CUI Jian, YANG Shuai. Differential confocal axial space measurement method based on five-dimensional auto-adjustment[J]. Optical Technique, 2023, 49(6): 692

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    Paper Information

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    Received: Mar. 14, 2023

    Accepted: --

    Published Online: Dec. 5, 2023

    The Author Email: Mingtuo CUI (17805421308@163.com)

    DOI:

    CSTR:32186.14.

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