Aspheric Surface Shape Error Correction Based on Modified Levenberg-Marquardt Algorithm

Jiannan Deng; Han Wang; Honghui Yao; Jiarong Zhang; Shaomu Zhuo; Xiaoqiang Yan

doi:10.3788/AOS202242.0512004

Acta Optica Sinica, Volume. 42, Issue 5, 0512004(2022)

Aspheric Surface Shape Error Correction Based on Modified Levenberg-Marquardt Algorithm

Jiannan Deng^1,2, Han Wang^1,2, Honghui Yao^2、*, Jiarong Zhang^1,2, Shaomu Zhuo^1,2, and Xiaoqiang Yan^1,2

¹State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangzhou, Guangdong 510006, China

²Mechanical and Electrical Engineering, Guangdong University of Technology, Guangzhou, Guangdong 510006, China

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Jiannan Deng, Han Wang, Honghui Yao, Jiarong Zhang, Shaomu Zhuo, Xiaoqiang Yan. Aspheric Surface Shape Error Correction Based on Modified Levenberg-Marquardt Algorithm[J]. Acta Optica Sinica, 2022, 42(5): 0512004

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Jul. 28, 2021

Accepted: Sep. 10, 2021

Published Online: Mar. 8, 2022

The Author Email: Yao Honghui (m13430351442@163.com)

DOI:10.3788/AOS202242.0512004

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology