[1] [1] Dai Mingkui, Xu Deyan. The present situation of imperfections testing and researching on the optical components［J］. Optical Instruments, 1996, 18(4): 32～39

[2] [2] A. Huard. Visibility method to classify microscopic surface defects for both reflection and t transmission systems［C］. SPIE, 1985, 525: 36～42

[3] [3] L. R. Baker. Inspection of surface flaws by comparator microscopy［J］. Appl. Opt., 1988, 27(22): 4620～4625

[4] [4] Zhang Xiao, Yang Guoguang, Cheng Shangyi et al.. Laser frequency spectrum analysis method and automatic inspection instrument of optical surface imperfection［J］. Chinese Journal of Scientific Instrument, 1994, 15(4): 396～399

[5] [5] Wang Fengquan, Yang Yongying, Sun Dandan. Research of digital inspection system of precise surface defect［J］. Optical Instruments, 2006, 28(3): 71～75

[6] [6] Wang Xue, Xie Zhijiang, Sun Hongyan et al.. Study on automatic flaw inspection system for large caliber precision optical surface［J］. Chinese Journal of Scientific Instrument, 2006, 27(10): 1262～1265

[7] [7] GB 1185-89. Surface defect s of optical components［S］. 1989

[8] [8] Liu Xu, Yang Yongying, Liu Dong et al.. Error analysis of sub-aperture synthesis for detecting surface defects of optical components［J］. Journal of Optoelectronics·Laser, 2008, 19(8): 1088～1093

[9] [9] Cheng Xiaofeng, Xu Xu, Zhang Lin et al.. Defect testing of large aperture optics based on high resolution CCD camera［J ］. High Power Laser and Particle Beams, 2009, 21(11): 1678～1680

[10] [10] Yang Yongying, Lu Chunhua, Liang Jiao et al.. Microscopic dark-field scattering imaging and digitalization evaluation system of defects on optical devices precision surface［J］. Acta Optica Sinica, 2007, 27(6): 1031～1038