Fig. 1. Cross-sectional schematic diagram of the anode layer Hall thruster (1, outer magnetic pole; 2, anode; 3, inner shield; 4, permanent magnet; 5, anode magnetic shield; 6, outer shield; 7, inner magnetic pole).阳极层霍尔推力器结构示意图(1, 外磁极; 2, 阳极; 3, 内屏蔽筒; 4, 磁钢; 5, 阳极磁屏蔽; 6, 外屏蔽筒; 7, 内磁极)

Fig. 2. Magnetic field lines: (a) Without anode magnetic shield; (b) with anode magnetic shield.磁场线　(a) 无阳极磁屏蔽;　(b) 有阳极磁屏蔽

Fig. 3. Simulation process.仿真流程

Fig. 4. Ion trajectory.离子轨迹

Fig. 5. Probability distribution of the incident ion energy.入射离子能量的概率分布

Fig. 6. Probability distribution of the cosine of the incident angle.入射角余弦值的概率分布

Fig. 7. Distribution of etching rate on upper surface of inner magnetic pole.内磁极上表面刻蚀速率分布

Fig. 8. Distribution of etching rate on inner surface of inner magnetic pole.内磁极内表面刻蚀速率分布

Fig. 9. Photos of the inner magnetic pole after experiment.实验后的内磁极刻蚀形貌图