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Optics and Precision Engineering, Volume. 18, Issue 7, 1544(2010)

Chemical mechanical grinding for quartz glass

QIU Zhong-jun1、*, ZHOU Li-bo2, FANG Feng-zhou1, SHINA Tsuyoshi2, and EDA Hiroshi2
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    QIU Zhong-jun, ZHOU Li-bo, FANG Feng-zhou, SHINA Tsuyoshi, EDA Hiroshi. Chemical mechanical grinding for quartz glass[J]. Optics and Precision Engineering, 2010, 18(7): 1544

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    Paper Information

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    Received: Sep. 14, 2009

    Accepted: --

    Published Online: Dec. 7, 2010

    The Author Email: QIU Zhong-jun (qiuzhongjun@gmail.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology