Interface roughness, surface roughness and soft X-ray reflectivity of Mo/Si multilayers with different layer number

Junling Qin; Jianda Shao; Kui Yi; Zhengxiu Fan

Chinese Optics Letters, Volume. 5, Issue 5, 301(2007)

Junling Qin^1,2、*, Jianda Shao^1,2, Kui Yi¹, and Zhengxiu Fan¹

Author Affiliations

¹Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800

²Graduate School of the Chinese Academy of Sciences, Beijing 100039

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References(11)

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CLP Journals

[1] Min Dai, Zhong Zhang, Jingtao Zhu, Xiaoqiang Wang, Jing Xu, Xiuhua Fu, Liang Bai, Qiushi Huang, Zhanshan Wang, Lingyan Chen, "Influence of interface roughness on reflectivity of tungsten/boron-carbide multilayers with variable bi-layer number by X-ray reflection and diffuse scattering," Chin. Opt. Lett. 7, 08738 (2009)

[2] Jun Chen, Xueke Xu, Chaoyang Wei, Minghong Yang, Jianxun Gu, Jianda Shao, "Real-time surface figure monitoring of optical elements in continuous polishing," Chin. Opt. Lett. 13, 032201 (2015)

[3] Yiwen Wang, Qiushi Huang, Qiang Yi, Li Jiang, Zhong Zhang, Zhanshan Wang, "Design of Pd/B₄C aperiodic multilayers for 8–12 nm region with flat reflectivity profile," Chin. Opt. Lett. 14, 073101 (2016)

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Junling Qin, Jianda Shao, Kui Yi, Zhengxiu Fan, "Interface roughness, surface roughness and soft X-ray reflectivity of Mo/Si multilayers with different layer number," Chin. Opt. Lett. 5, 301 (2007)

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Paper Information

Received: Nov. 16, 2006

Accepted: --

Published Online: Jun. 27, 2007

The Author Email: Junling Qin (qinjl@siom.ac.cn)

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology