Chinese Journal of Lasers, Volume. 52, Issue 12, 1202403(2025)

Fabrication of Waveguide Bragg Gratings on Sapphire Chip and Their Temperature Sensing Characteristics

Yijin Wang, Jia Liu*, Nan Yang, Guowen An, and Pinggang Jia
Author Affiliations
  • State Key Laboratory of Dynamic Measurement Technology, School of Semiconductor and Physics, North University of China, Taiyuan 030051, Shanxi , China
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    Figures & Tables(12)
    Schematic diagram of femtosecond laser processing waveguide Bragg grating system
    Single-line microscopic images inscribed under different pulse energies. (a) Top view; (b) cross-sectional view
    Design drawings and topographies. (a) Structural design drawing of DCW; (b) structural design drawing of WBG; (c) top view of WBG; (d) cross section of WBG with grating at center of waveguide
    Schematic diagram of end-coupling system
    Optical microscope cross sections of waveguides and corresponding mode profiles with scale of 10 μm
    Waveguide length versus total loss
    Experimental diagram of spectral response characterization of WBG
    Spectra of WBGs with different lengths. (a)(b)Reflectance spectra; (c)(d) transmission spectra with insets showing grating length versus reflectivity
    Spectra of 10 mm long waveguide Bragg grating. (a) Reflectance spectrum; (b) transmission spectrum
    Changes in WBG reflection spectra during warming. (a) TE mode; (b) TM mode
    WBG center wavelength versus temperature at different temperatures. (a) TM mode; (b) TE mode
    • Table 1. FWHM values of mode profiles under different waveguide core radii

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      Table 1. FWHM values of mode profiles under different waveguide core radii

      Radius /µm44.54.855.5
      FWHM /μm(horizontal)7.507.547.287.5213.24
      FWHM /μm(vertical)7.866.827.067.849.27
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    Yijin Wang, Jia Liu, Nan Yang, Guowen An, Pinggang Jia. Fabrication of Waveguide Bragg Gratings on Sapphire Chip and Their Temperature Sensing Characteristics[J]. Chinese Journal of Lasers, 2025, 52(12): 1202403

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    Paper Information

    Category: Laser Micro-Nano Manufacturing

    Received: Jan. 13, 2025

    Accepted: Mar. 19, 2025

    Published Online: May. 24, 2025

    The Author Email: Jia Liu (jialiu@nuc.edu.cn)

    DOI:10.3788/CJL250466

    CSTR:32183.14.CJL250466

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