Acta Optica Sinica, Volume. 39, Issue 11, 1105002(2019)
Wavefront Reconstruction Error Analysis Method for Diffraction Optical System
Figures & Tables(12)
Fig. 2. Classification of influencing factors of phase diversity wavefront reconstruction error
Fig. 4. Analysis model of influence of focal plane position error on wavefront reconstruction error
Fig. 6. Analysis model of influence of defocus distance error on wavefront reconstruction error
Fig. 7. Analysis model of influence of diffraction efficiency error on wavefront reconstruction error
Fig. 9. Analysis result of single error factor. (a) Focal plane position error; (b) defocus distance error; (c) diffraction efficiency error
Table 1. Design parameters of diffractive optical system
View tableTable 1. Design parameters of diffractive optical system
Optical system parameter Value Focus length f /mm10 F #5 Wavelength λ /nm500 Diffraction efficiency η 0.60 CCD pixel size /μm 3 Field of view /(°) 0.10 Gaussian noise 0.002 Aberration 0.3017 λ
Table 2. Values of error factors and wavefront RMSE
View tableTable 2. Values of error factors and wavefront RMSE
Error type Error value Corresponding wavefront RMSE Focus plane position error 0.5 λ 0.0511 λ Defocus distance error 0.5 λ 0.0887 λ Diffraction efficiency error 10% 0.0972 λ
Table 3. Simulation and synthesis results under various error combination conditions
View tableTable 3. Simulation and synthesis results under various error combination conditions
Focus plane position error /nm Defocus distance error /nm Diffraction efficiency error /% Model analysis results / λ Actual wavefront reconstruction error / λ Relative deviation /% -300 -300 5 0.1778 0.1540 15.4 -300 -300 10 0.1989 0.2468 19.4 -300 -150 5 0.0796 0.0714 11.5 -300 -150 10 0.1196 0.1036 15.5 -300 100 5 0.0598 0.0542 10.2 -300 100 10 0.1075 0.1253 14.2 -300 200 5 0.0859 0.0761 12.8 -300 200 10 0.1239 0.1489 16.8 -200 -300 5 0.1765 0.1545 14.2 -200 -300 10 0.1978 0.1673 18.2 -200 -150 5 0.0766 0.0854 10.3 -200 -150 10 0.1177 0.1030 14.3 -200 100 5 0.0558 0.0614 9.0 -200 100 10 0.1054 0.0932 13.0 -200 200 5 0.0832 0.0745 11.6 -200 200 10 0.1221 0.1446 15.6 100 -300 5 0.1763 0.2026 13.0 100 -300 10 0.1976 0.1689 17.0 100 -150 5 0.0762 0.0698 9.1 100 -150 10 0.1174 0.1351 13.1 100 100 5 0.0552 0.0512 7.8 100 100 10 0.1050 0.1191 11.8 100 200 5 0.0827 0.0749 10.4 100 200 10 0.1218 0.1422 14.4 200 -300 5 0.1793 0.1570 14.2 200 -300 10 0.2003 0.2449 18.2 200 -150 5 0.0830 0.0925 10.3 200 -150 10 0.1220 0.1067 14.3 200 100 5 0.0643 0.0590 9.0 200 100 10 0.1101 0.1265 13.0 200 200 5 0.0891 0.1008 11.6 200 200 10 0.1262 0.1495 15.6
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Kai Qiao, Xiyang Zhi, Dong Yang, Di Yu, Dawei Wang. Wavefront Reconstruction Error Analysis Method for Diffraction Optical System[J]. Acta Optica Sinica, 2019, 39(11): 1105002
Paper Information
Category: Diffraction and Gratings
Received: Jun. 13, 2019
Accepted: Jul. 24, 2019
Published Online: Nov. 6, 2019
The Author Email: Zhi Xiyang (zhixiyang@hit.edu.cn)
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