[1] [1] Wu, Y.C., Chiang, H.T., Hsu, C.C.: Fabrication of microlens array diffuser films with controllable haze distribution by combination of breath figures and replica molding methods. Opt. Express 16(24), 19978 (2008)

[2] [2] Oh, S., Cho, J.W., Lee, J., Han, J., Kim, S.K., Nam, Y.: A scalable haze-free antireflective hierarchical surface with self-cleaning capability. Adv. Sci. (Weinh.) 9(27), 2202781 (2022)

[3] [3] Leem, J.W., Yu, J.S.: Artificial inverted compound eye structured polymer films with light-harvesting and selfcleaning functions for encapsulated III–V solar cell applications. RSC Advances 5(75), 60804–60813 (2015)

[4] [4] Hu, J., Bandyopadhyay, S., Liu, Y., Shao, L.: A review on metasurface: from principle to smart metadevices. Front. Phys. (Lausanne) 8, 586087 (2021)

[5] [5] Xie, Y., Wang, W., Chen, H., Konneker, A., Popa, B.I., Cummer, S.A.: Wavefront modulation and subwavelength diffractive acoustics with an acoustic metasurface. Nat. Commun. 5(1), 5553 (2014)

[6] [6] Jang, M., Horie, Y., Shibukawa, A., Brake, J., Liu, Y., Kamali, S.M., Arbabi, A., Ruan, H., Faraon, A., Yang, C.: Wavefront shaping with disorder-engineered metasurfaces. Nat. Photonics 12(2), 84–90 (2018)

[7] [7] Yang, Y., Wang, W., Moitra, P., Kravchenko, I.I., Briggs, D.P., Valentine, J.: Dielectric meta-reflectarray for broadband linear polarization conversion and optical vortex generation. Nano Lett. 14(3), 1394–1399 (2014)

[8] [8] Zhu, H.L., Cheung, S.W., Chung, K.L., Yuk, T.I.: Linear-to-circular polarization conversion using metasurface. IEEE Trans. Antenn. Propag. 61(9), 4615–4623 (2013)

[9] [9] Chen, L., Ma, Q., Jing, H.B., Cui, H.Y., Liu, Y., Cui, T.J.: Space-energy digital-coding metasurface based on an active amplifier. Phys. Rev. Appl. 11(5), 054051 (2019)

[10] [10] Lawrence, N., Trevino, J., Dal Negro, L.: Aperiodic arrays of active nanopillars for radiation engineering. J. Appl. Phys. 111(11), 113101 (2012)

[11] [11] Chen, B.H., Wu, P.C., Su, V.C., Lai, Y.C., Chu, C.H., Lee, I.C., Chen, J.W., Chen, Y.H., Lan, Y.C., Kuan, C.H., Tsai, D.P.: GaN metalens for pixel-level full-color routing at visible light. Nano Lett. 17(10), 6345–6352 (2017)

[12] [12] Chen, X., Huang, L., Muhlenbernd, H., Li, G., Bai, B., Tan, Q., Jin, G., Qiu, C.W., Zhang, S., Zentgraf, T.: Dual-polarity plasmonic metalens for visible light. Nat. Commun. 3(1), 1198 (2012)

[13] [13] Lin, R.J., Su, V.C., Wang, S., Chen, M.K., Chung, T.L., Chen, Y.H., Kuo, H.Y., Chen, J.W., Chen, J., Huang, Y.T., Wang, J.H., Chu, C.H., Wu, P.C., Li, T., Wang, Z., Zhu, S., Tsai, D.P.: Achromatic metalens array for full-colour light-field imaging. Nat. Nanotechnol. 14(3), 227–231 (2019)

[14] [14] Wang, S., Wu, P.C., Su, V.C., Lai, Y.C., Chen, M.K., Kuo, H.Y., Chen, B.H., Chen, Y.H., Huang, T.T., Wang, J.H., Lin, R.M., Kuan, C.H., Li, T., Wang, Z., Zhu, S., Tsai, D.P.: A broadband achromatic metalens in the visible. Nat. Nanotechnol. 13(3), 227– 232 (2018)

[15] [15] Hsu, L., Ndao, A., Kante, B.: Broadband and linear polarization metasurface carpet cloak in the visible. Opt. Lett. 44(12), 2978– 2981 (2019)

[16] [16] Hu, J., Lang, T., Shen, C., Shao, L.: Combined Mie resonance metasurface for wideband terahertz absorber. Appl. Sci. (Basel) 8(9), 1679 (2018)

[17] [17] Liu, X., Fan, K., Shadrivov, I.V., Padilla, W.J.: Experimental realization of a terahertz all-dielectric metasurface absorber. Opt. Express 25(1), 191–201 (2017)

[18] [18] Yao, Y., Shankar, R., Kats, M.A., Song, Y., Kong, J., Loncar, M., Capasso, F.: Electrically tunable metasurface perfect absorbers for ultrathin mid-infrared optical modulators. Nano Lett. 14(11), 6526–6532 (2014)

[19] [19] Yu, N., Genevet, P., Kats, M.A., Aieta, F., Tetienne, J.P., Capasso, F., Gaburro, Z.: Light propagation with phase discontinuities: generalized laws of reflection and refraction. Science 334(6054), 333–337 (2011)

[20] [20] Guo, X., Pu, M., Guo, Y., Ma, X., Li, X., Luo, X.: Flexible and tunable dielectric color meta-hologram. Plasmonics 15(1), 217– 223 (2020)

[21] [21] Ni, X., Kildishev, A.V., Shalaev, V.M.: Metasurface holograms for visible light. Nat. Commun. 4(1), 2807 (2013)

[22] [22] Zheng, G., Muhlenbernd, H., Kenney, M., Li, G., Zentgraf, T., Zhang, S.: Metasurface holograms reaching 80% efficiency. Nat. Nanotechnol. 10(4), 308–312 (2015)

[23] [23] Mandorlo, F., Amara, N., Nguyen, H.S., Charlety-Meano, A., Belarouci, A., Orobtchouk, R.: Color management of semi-transparent nano-patterned surfaces. Opt. Eng. 60(5), 055101 (2021)

[24] [24] Khodadad, I., Dhindsa, N., Saini, S.S.: Refractometric sensing using high-order diffraction spots from ordered vertical silicon nanowire arrays. IEEE Photonics J. 8(2), 4501010 (2016)

[25] [25] Van, E.L., Rodriguez, I., Low, H.Y., Elmouelhi, N., Lowen-haupt, B., Natarajan, S., Lim, C.T., Prajapati, R., Vyakarnam M., Cooper, K.: Review: Micro-and nanostructured surface engineering for biomedical applications. J. Mater. Res. 28(2), 165–174 (2013)

[26] [26] Jeong, S., McGehee, M.D., Cui, Y.: All-back-contact ultra-thin silicon nanocone solar cells with 13.7% power conversion efficiency. Nat. Commun. 4(1), 2950 (2013)

[27] [27] Kim, M.C., Jang, S., Choi, J., Kang, S.M., Choi, M.: Moth-eye structured polydimethylsiloxane films for high-efficiency perovskite solar cells. Nano-Micro. Lett. 11(1), 53 (2019)

[28] [28] Lozano, G., Rodriguez, S., Verschuuren, M., Gmez Rivas, J.: Metallic nanostructures for efficient LED lighting. Light Sci. Appl. 5(6), e16080 (2016)

[29] [29] Haldar, A., Reddy, M.S., Vijaya, R.: Enhancement of light collection through flexible polymeric films patterned using self-assembled photonic crystals. J. Phys. D. Appl. Phys. 48(26), 265103 (2015)

[30] [30] Haldar, A., Reddy, M.S., Vijaya, R.: Inexpensive graded-index antireflective surfaces for silicon-based optoelectronic devices. J. Opt. Soc. Am. B 33(11), 2331–2338 (2016)

[31] [31] Hwang, I., Choi, D., Lee, S., Seo, J.H., Kim, H.K., Yoon, I., Seo, K.: Enhancement of light absorption in photovoltaic devices using textured polydimethylsiloxane stickers. ACS Appl. Mater. Interfaces 9(25), 21276–21282 (2017)

[32] [32] Marus, M., Hubarevich, A., Fan, W.J., Wang, H., Smirnov, A., Wang, K., Huang, H., Sun, X.W.: Optical haze of randomly arranged silver nanowire transparent conductive films with wide range of nanowire diameters. AIP Adv. 8(3), 035201 (2018)

[33] [33] Choi, M., Leem, J.W., Yu, J.S.: Antireflective gradient-refractive-index material distributed microstructures with high haze and superhydrophilicity for silicon-based optoelectronic applications. RSC Advances 5(32), 25616–25624 (2015)

[34] [34] Yun, M.J., Sim, Y.H., Lee, D.Y., Cha, S.I.: Omni-directional light capture in PERC solar cells enhanced by stamping hierarchical structured silicone encapsulation that mimics leaf epidermis. RSC Advances 10(57), 34837–34846 (2020)

[35] [35] Yan, Q., Zhou, Z., Zhao, X.S.: Inward-growing self-assembly of colloidal crystal films on horizontal substrates. Langmuir 21(7), 3158–3164 (2005)

[36] [36] Choi, H.K., Kim, M.H., Im, S.H., Park, O.O.: Fabrication of ordered nanostructured arrays using poly (dimethylsiloxane) replica molds based on three-dimensional colloidal crystals. Adv. Funct. Mater. 19(10), 1594–1600 (2009)

[37] [37] Haldar, A., Joshi, G., Vijaya, R.: Diffractive metasurfaces with opposite curvatures of unit cells. Opt. Laser Technol. 162, 109309 (2023)

[38] [38] Hassanin, H., Mohammadkhani, A., Jiang, K.: Fabrication of hybrid nanostructured arrays using a PDMS/PDMS replication process. Lab Chip 12(20), 4160–4167 (2012)

[39] [39] Kuo, S.Y., Hsieh, M.Y., Han, H.V., Lai, F.I., Chuang, T.Y., Yu, P., Lin, C.C., Kuo, H.C.: Flexible-textured polydimethylsiloxane antireflection structure for enhancing omnidirectional photovoltaic performance of Cu(In, Ga)Se2 solar cells. Opt. Express 22(3), 2860–2867 (2014)

[40] [40] Bley, K., Semmler, J., Rey, M., Zhao, C., Martic, N., Taylor, R., Stingl, M., Vogel, N.: Hierarchical design of metal micro/nanohole array films optimizes transparency and haze factor. Adv. Funct. Mater. 28(13), 1706965 (2018)

[41] [41] Park, J., Ham, J., Lee, I., Lee, J.: Strain induced subwavelength-structure for haze-free and highly transparent flexible plastic substrate. Nanoscale 10(31), 14868–14876 (2018)