Progress of Thin-Film Lithium Niobate Acousto-Optic Modulators (Invited)

Jiying Huang; Lei Wan; Chengyu Chen; Yuping Chen; Zhaohui Li

doi:10.3788/LOP240551

Laser & Optoelectronics Progress, Volume. 61, Issue 11, 1116008(2024)

Progress of Thin-Film Lithium Niobate Acousto-Optic Modulators (Invited)

Jiying Huang^1,2, Lei Wan^1,2、*, Chengyu Chen³, Yuping Chen^1,3, and Zhaohui Li^4,5

Author Affiliations

¹School of Physics, Ningxia University, Yinchuan 750021, Ningxia, China

²Department of Electronic Engineering, College of Information Science and Technology, Jinan University, Guangzhou 510632, Guangdong, China

³State Key Laboratory on Advanced Optical Communication Systems and Networks, Department of Physics and Astronomy, Shanghai Jiao Tong University, Shanghai 200240, China

⁴Guangdong Provincial Key Laboratory of Optoelectronic Information Processing Chips and Systems, Sun Yat-sen University, Guangzhou 510275, Guangdong China

⁵Southern Marine Science and Engineering Guangdong Laboratory (Zhuhai), Zhuhai 519000, Guangdong, China

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Figures & Tables(8)

Fig. 1. Comparison of different piezoelectric films. (a) Comparison of acoustic wave modes between the bulk LiTaO₃ and thin-film LiTaO₃^[18]; (b) acousto-optic modulator based on TFLN^[23]; (c) buried Si acousto-optic modulator based on thin-film AlN^[11]; (d) acousto-optic modulator based on AlScN-Si hybrid integration platform^[24]; (e) acousto-optic modulator based on GaN waveguide^[25]; (f) crystal structures of the LN^[26]

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Fig. 2. Principle of on-chip acousto-optic modulator^[37]. (a) Piezoelectric effect (from left to right: no pressure, extruded, and stretched); (b) schematic of IDT structure and distribution of two typical acoustic modes; (c) optical mode distribution of single-mode waveguide end face (TE₀₀ and TM₀₀); (d) coupling between the microwave, acoustic, and optical fields^[37]

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Fig. 3. On-chip homogeneous-integration TFLN acousto-optic modulators. (a) Non-suspended MZI and RT acousto-optic modulators integrated on LN substrate^[41]; (b) suspended MZI and RT acousto-optic modulators integrated on Si substrate^[37]; (c) non-suspended acousto-optic modulator integrated on sapphire substrate^[42]

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Fig. 4. On-chip acousto-optic modulators based on suspended photonic crystal structures. (a) Broadband MZI acousto-optic modulator based on photonic crystal^[43]; (b) highly efficient acousto-optic modulator based on one-dimensional photonic crystal nanobeam^[45]

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Fig. 5. On-chip hybrid-integration acousto-optic modulators. (a) RT acousto-optic modulator based on TFLN-polymer hybrid integration platform^[48]; (b) deflector based on TFLN-polymer hybrid integration platform and measurement results of optical sidebands^[49]; (c) MZI acousto-optic modulator based on TFLN-chalcogenide hybrid integration platform and distributions of optical and acoustic modes^[39]; (d) RT acousto-optic modulator based on TFLN-chalcogenide hybrid integration platform^[50]

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Fig. 6. Microwave photon filter and LiDAR. (a) Microwave photon filter and frequency-domain S₂₁ spectrum based on etch-less TFLN acousto-optic modulator^[65]; (b) schematic of LiDAR and dispersion diagram of beam steering based on TFLN deflector^[66]

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Fig. 7. Optical isolator based on TFLN acousto-optic modulator. (a) Acousto-optic modulator and dispersion diagram based on suspended TFLN rectangular waveguide^[68]; (b) TFLN optical isolator based on phonon-mediated Autler-Townes splitting^[69]

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Table 1. Comparison of modulation metrics for TFLN acousto-optic modulators

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Table 1. Comparison of modulation metrics for TFLN acousto-optic modulators

Acoustic cavity	Platform	Structure	L_AO /μm	Acoustic frequency /GHz	V_π /V	$V_{π} \cdot L$ /（V $\cdot$ cm）	α_p / $(r a d / \sqrt[]{m W})$	g₀ /Hz
√^a	Y-cut TFLN^［41］	MZI	1200	0.117	41.6	5	0.073	‒
√^a	Y-cut TFLN^［41］	RT	2400	0.117	‒	‒	‒	‒
√^b	X-cut TFLN^［37］	MZI	100	3.33	4.6	0.045	‒	‒
√^b	X-cut TFLN^［37］	RT	100	2.007	0.77	0.0077	‒	1.1×10³
×	X-cut TFLN^［42］	Bus waveguide	600	0.7‒0.8	‒	‒	‒	‒
√^b	X-cut TFLN^［45］	OMC	‒	1.85	0.02	‒	‒	8×10⁴
×	Z-cut TFLN^［48］	RT	‒	2.1	‒	‒	‒	‒
×	X-cut TFLN^［23］	Bus waveguide	100	2.9	‒	‒	‒	‒
×	Y-cut TFLN^［38］	MZI	2400	0.11	3.92	0.94	0.26	‒
√^b	Z-cut TFLN^［43］	OMC	45	1.16	4.2	0.019	0.54	‒
×	Z-cut TFLN^［49］	Bus waveguide	75	3	‒	‒	‒	‒
×	Y-cut LN^［55］	Buried bus waveguide	240	0.087	18.7	1.78	‒	‒
×	X-cut TFLN+ChG^［39］	MZI	120	0.844	2.5	0.03	0.4	‒
×	X-cut TFLN+ChG^［50］	RT	120	0.84	1.74	0.02	0.57	‒
×	X-cut TFLN^［54］	Bus waveguide	‒	0.61	‒	‒	‒	‒

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Jiying Huang, Lei Wan, Chengyu Chen, Yuping Chen, Zhaohui Li. Progress of Thin-Film Lithium Niobate Acousto-Optic Modulators (Invited)[J]. Laser & Optoelectronics Progress, 2024, 61(11): 1116008

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Paper Information

Category: Materials

Received: Jan. 18, 2024

Accepted: Feb. 27, 2024

Published Online: Jun. 17, 2024

The Author Email: Lei Wan (wallen-0407@163.com)

DOI:10.3788/LOP240551

CSTR:32186.14.LOP240551

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology