Optoelectronic Technology, Volume. 41, Issue 4, 324(2021)

Study on the Current Situation and Trends of OLED Defect Inspection for CELL Phase

Tian QIU1, Xiaoyan LIN1, Xin ZHANG1, Chuanbo QIN1, Chen Jung TSAI2, Lin LUO3, and Honglong NING4、*
Author Affiliations
  • 1Wuyi University⁃Institute of Semiconductors, CAS Joint Lab of Digital Optical Chip, Wuyi University , Jiangmen Guangdong, 529020,CHN
  • 2Astri , Hong Kong, 999077,CHN
  • 3Engineering College, Peking University, Beijing, 100871,CHN
  • 4Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 51060,CHN
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    Figures & Tables(10)
    The manufacturing process of OLED
    The diagram of evaporation process
    The visual detection scheme
    PG and aging test system made up of PG
    Comparison before and after defect compensation
    • Table 1. Three main detection methods and contents of CELL segment

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      Table 1. Three main detection methods and contents of CELL segment

      检测手段检测原理检测内容
      光学检测光学成像点缺、线缺、MURA、金属残留、涂布不均、颗粒、曝光异常、蚀刻不净、贴合异物
      电学检测激励响应法曝光异常、像素、色偏、残像
      人工目检裸眼或使用放大镜观测MURA、针孔、颗粒、涂布不均、残像、屏幕外观损坏、屏幕物理瑕疵点
    • Table 2. Comparison of OLED semi⁃finished screen appearance inspection items based on AOI

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      Table 2. Comparison of OLED semi⁃finished screen appearance inspection items based on AOI

      屏幕外观检测项目手段目的
      缺陷数量迭代差影法得出像素差
      亮度去噪、平均灰度值求亮度均值
      面缺陷阈值分割目标提取
      缺陷面积边缘内像素点数检测目标区域大小
      MURA数学形态学分割法将缺陷分割出来
      划痕暗场成像得到划痕亮度
    • Table 3. List of platform parameter description

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      Table 3. List of platform parameter description

      功能和性能项典型值
      液晶屏型号TPA034
      分辨率(RGB)480×480
      有效显示面积/mm60.48×60.48
      亮度/(cd·m-2)7~750
      屏蔽状态
      加热状态
      设计方案项
      二合一玻璃尺寸/mmA×B×C
      加热玻璃尺寸/mmD×E×F
      导光板尺寸/mmH×I×J
      技术状态项SJPT⁃034⁃01⁃V01

      注:外形尺寸具体数值以字母代替

    • Table 3. Comparison of OLED semi-finished light test items based on AOI

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      Table 3. Comparison of OLED semi-finished light test items based on AOI

      测试项目测试参数测试手段
      点类、线类缺陷灰度值双阈值分割法
      MURA缺陷梯度变化算法
      像素阶跃灰度值边界检测法
      对比度信号强度的最大差值滤波器调制
      色度三刺激值xyz测色仪
    • Table 4. Equipment manufacturers for reference

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      Table 4. Equipment manufacturers for reference

      厂家地点产品
      武汉精测电子湖北武汉PG, LCD CELL test, AMOLED CELL上料机,下料机LCD检查设备
      联得装备广东深圳全自动OCA特显整合设备,全自动OLED 3D贴合整线
      集银科技广东深圳全自动高精度偏贴机,全自动全贴合机
      中导光电广东肇庆亮场光学检测系统
      鑫三力广东深圳全自动贴付机,全自动OCG
      致茂电子台湾各类电子仪器,OLED老化测试,图形发生器
      晶彩科台湾新竹显示缺陷判定和定位
      集银科技广东深圳JM⁃962CII背光源前工序全自动组装机,JM⁃965CII背光源后工序全自动叠片机
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    Tian QIU, Xiaoyan LIN, Xin ZHANG, Chuanbo QIN, Chen Jung TSAI, Lin LUO, Honglong NING. Study on the Current Situation and Trends of OLED Defect Inspection for CELL Phase[J]. Optoelectronic Technology, 2021, 41(4): 324

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    Paper Information

    Category: Study Report

    Received: Mar. 26, 2021

    Accepted: --

    Published Online: Aug. 3, 2022

    The Author Email: NING Honglong (ninghb@scut.edu.cn)

    DOI:10.19453/j.cnki.1005-488x.2021.04.014

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