Chinese Journal of Lasers, Volume. 14, Issue 11, 671(1987)
Diagnosis of kinetic process in silane LPCVD by means of OLD
References(1)
[1] [1] Η. Y. Boening; J. Low-Temperature Plasma Chemistry, 1985, 101.
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Fu Guangsheng, Li Xiaowei, Han Li, Zhang Lianshui, Dong Lifang, Lu Furun, Xue Chunyin. Diagnosis of kinetic process in silane LPCVD by means of OLD[J]. Chinese Journal of Lasers, 1987, 14(11): 671
Paper Information
Category: laser devices and laser physics
Received: Sep. 1, 1986
Accepted: --
Published Online: Aug. 10, 2012
The Author Email:
CSTR:32186.14.
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