Opto-Electronic Engineering, Volume. 45, Issue 4, 170642(2018)
Study on the variable pressure CCOS polishing technology
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Ye Fengfei, Yu Deping, Wan Yongjian, Liu Haitao, Zhao Hongshen. Study on the variable pressure CCOS polishing technology[J]. Opto-Electronic Engineering, 2018, 45(4): 170642
Paper Information
Category: Article
Received: Nov. 22, 2017
Accepted: --
Published Online: May. 29, 2018
The Author Email: Fengfei Ye (yefengfei2017@163.com)
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