Chinese Optics, Volume. 17, Issue 2, 334(2024)
Development of high-precision beam splitter for inter-satellite communication system
Fig. 1. Theoretical spectra transmittance curve of the splitter film
Fig. 2. Double sided theoretical spectra transmittance curve of the beam splitter mirror
Fig. 3. Thin film stress maps. (a) Tensile stress; (b) compressive stress
Fig. 4. Schematic diagram of reflection wavefront of the substrate
Fig. 5. Schematic diagram of the Power and curvature radius of the substrate
Fig. 6. Transmittance test curve and fitting curve of the splitter film
Fig. 9. Fitting curve for the change in sample power with the thickness of deposited SiO2
Table 1. Material deposition process parameters
View tableView in ArticleTable 1. Material deposition process parameters
材料 沉积速率/(nm·s−1) 起始真空度/(×10−4 Pa) 沉积温度/(°C) Ta2O5 0.4 7 220 SiO2 0.6 7 220
Table 2.
\begin{document}$\Delta $\end{document} View tableView in ArticleTable 2.
\begin{document}$\Delta $\end{document} 编号 电压/V 束流/mA 面形图 ∆power（λ） 基底 沉积后 1 1 100 950 0.148 5 2 1 000 920 0.160 2 3 950 900 0.182 1
Table 3. Process parameters of ion source
View tableView in ArticleTable 3. Process parameters of ion source
材料 电压/ V 束流/ mA 气体 O2/ Sccm 气体 Ar/ Sccm Ta2O5 1 100 950 50 8 SiO2（直控） 1 100 950 50 8 SiO2（背反） 950 900 50 8 SiO2（晶控） 950 900 50 8
Table 4. Surface shape results of sample deposited beam splitter
View tableView in ArticleTable 4. Surface shape results of sample deposited beam splitter
类别 编号 1# 2# 3# 4# 基底 面形图 PV（λ） 0.074 6 0.076 1 0.077 4 0.072 3 RMS（λ） 0.008 7 0.009 2 0.009 7 0.008 3 Power（λ） 0.007 3 0.008 1 0.008 4 0.007 8 沉积后 面形 PV（λ） 0.516 7 0.528 9 0.531 6 0.515 3 RMS（λ） 0.111 8 0.111 6 0.111 4 0.111 9 Power（λ） −0.385 9 −0.383 9 −0.382 7 −0.3854
Table 5. Data on the variation of sample Power and
A -values with different thicknesses of deposited SiO2 filmView tableView in ArticleTable 5. Data on the variation of sample Power and
A -values with different thicknesses of deposited SiO2 filmSiO2厚度（nm） ∆Power（λ） A(∆λ/100 nm SiO2) 3 500 0.155 1 0.004 43 5 000 0.228 0 0.004 56 6 500 0.308 8 0.004 75 8 000 0.394 4 0.004 93 9 500 0.488 3 0.005 14
Table 6. Surface parameters of samples before and after correction
View tableView in ArticleTable 6. Surface parameters of samples before and after correction
类别 面形图 PV（λ） RMS（λ） Power（λ） 修正前 0.531 6 0.111 4 −0.382 7 修正后 0.121 9 0.016 2 −0.042 9
Table 7. Surface parameters and surface profile before and after correction
View tableView in ArticleTable 7. Surface parameters and surface profile before and after correction
类别 面形图 PV（λ） RMS（λ） Power（λ） 基底 0.0723 0.0083 0.0078 修正前（ 反射面形） 0.5153 0.1119 −0.3854 修正后（反射面形） 0.0888 0.0107 −0.0153 修正前（透过面形） 0.0694 0.0097 0.0136 修正后（透过面形） 0.0783 0.0103 0.0141
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Zhen-yu WANG, Xiu-hua FU, Zhao-wen LIN, Jian-shan HUANG, Yu-jun WEI, Gui-qing WU, Yong-gang PAN, Suo-tao DONG, Ben WANG. Development of high-precision beam splitter for inter-satellite communication system[J]. Chinese Optics, 2024, 17(2): 334
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Received: Jun. 9, 2023
Accepted: --
Published Online: Apr. 15, 2024
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